Germanium photodiodes on pyramidal textured surface by Metal-Assisted Chemical Etching

Munho Kim, Soongyu Yi, Jeong Dong Kim, Xin Yin, Jun Li, Jihye Bong, Dong Liu, Shih Chia Liu, Alexander Kvit, Weidong Zhou, Xudong Wang, Zongfu Yu, Zhenqiang Ma, Xiuling Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We demonstrate a Ge photodiode on pyramidal textured surface by Metal-Assisted Chemical Etching (MacEtch) technique. This photodiode shows both reduced dark current and enhanced responsivity at near infrared (NIR) wavelength ranges.

Original languageEnglish (US)
Title of host publicationCLEO
Subtitle of host publicationApplications and Technology, CLEO_AT 2019
PublisherOSA - The Optical Society
ISBN (Electronic)9781557528209
DOIs
StatePublished - Jan 1 2019
EventCLEO: Applications and Technology, CLEO_AT 2019 - San Jose, United States
Duration: May 5 2019May 10 2019

Publication series

NameOptics InfoBase Conference Papers
VolumePart F127-CLEO_AT 2019

Conference

ConferenceCLEO: Applications and Technology, CLEO_AT 2019
CountryUnited States
CitySan Jose
Period5/5/195/10/19

Fingerprint

Germanium
Photodiodes
Etching
Metals
Dark currents
Infrared radiation
Wavelength

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

Cite this

Kim, M., Yi, S., Kim, J. D., Yin, X., Li, J., Bong, J., ... Li, X. (2019). Germanium photodiodes on pyramidal textured surface by Metal-Assisted Chemical Etching. In CLEO: Applications and Technology, CLEO_AT 2019 (Optics InfoBase Conference Papers; Vol. Part F127-CLEO_AT 2019). OSA - The Optical Society. https://doi.org/10.1364/CLEO_AT.2019.JTh2A.31

Germanium photodiodes on pyramidal textured surface by Metal-Assisted Chemical Etching. / Kim, Munho; Yi, Soongyu; Kim, Jeong Dong; Yin, Xin; Li, Jun; Bong, Jihye; Liu, Dong; Liu, Shih Chia; Kvit, Alexander; Zhou, Weidong; Wang, Xudong; Yu, Zongfu; Ma, Zhenqiang; Li, Xiuling.

CLEO: Applications and Technology, CLEO_AT 2019. OSA - The Optical Society, 2019. (Optics InfoBase Conference Papers; Vol. Part F127-CLEO_AT 2019).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kim, M, Yi, S, Kim, JD, Yin, X, Li, J, Bong, J, Liu, D, Liu, SC, Kvit, A, Zhou, W, Wang, X, Yu, Z, Ma, Z & Li, X 2019, Germanium photodiodes on pyramidal textured surface by Metal-Assisted Chemical Etching. in CLEO: Applications and Technology, CLEO_AT 2019. Optics InfoBase Conference Papers, vol. Part F127-CLEO_AT 2019, OSA - The Optical Society, CLEO: Applications and Technology, CLEO_AT 2019, San Jose, United States, 5/5/19. https://doi.org/10.1364/CLEO_AT.2019.JTh2A.31
Kim M, Yi S, Kim JD, Yin X, Li J, Bong J et al. Germanium photodiodes on pyramidal textured surface by Metal-Assisted Chemical Etching. In CLEO: Applications and Technology, CLEO_AT 2019. OSA - The Optical Society. 2019. (Optics InfoBase Conference Papers). https://doi.org/10.1364/CLEO_AT.2019.JTh2A.31
Kim, Munho ; Yi, Soongyu ; Kim, Jeong Dong ; Yin, Xin ; Li, Jun ; Bong, Jihye ; Liu, Dong ; Liu, Shih Chia ; Kvit, Alexander ; Zhou, Weidong ; Wang, Xudong ; Yu, Zongfu ; Ma, Zhenqiang ; Li, Xiuling. / Germanium photodiodes on pyramidal textured surface by Metal-Assisted Chemical Etching. CLEO: Applications and Technology, CLEO_AT 2019. OSA - The Optical Society, 2019. (Optics InfoBase Conference Papers).
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