@inproceedings{7036e1fa44e747179eacd771264aaa07,
title = "Germanium photodiodes on pyramidal textured surface by Metal-Assisted Chemical Etching",
abstract = "We demonstrate a Ge photodiode on pyramidal textured surface by Metal-Assisted Chemical Etching (MacEtch) technique. This photodiode shows both reduced dark current and enhanced responsivity at near infrared (NIR) wavelength ranges.",
author = "Munho Kim and Soongyu Yi and Kim, {Jeong Dong} and Xin Yin and Jun Li and Jihye Bong and Dong Liu and Liu, {Shih Chia} and Alexander Kvit and Weidong Zhou and Xudong Wang and Zongfu Yu and Zhenqiang Ma and Xiuling Li",
note = "Funding Information: This work is supported by the National Science Foundation under grant no. 14-62946 (fabrication), the U.S. Department of Energy, Office of Basic Energy Sciences, Division of Materials Sciences and Engineering under award no. DE-FG0207ER46471 (device design and characterization), and a gift from Lam Research Corporation (materials).; 2019 Conference on Lasers and Electro-Optics, CLEO 2019 ; Conference date: 05-05-2019 Through 10-05-2019",
year = "2019",
month = may,
doi = "10.23919/CLEO.2019.8749589",
language = "English (US)",
series = "2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings",
address = "United States",
}