Abstract
We demonstrate a Ge photodiode on pyramidal textured surface by Metal-Assisted Chemical Etching (MacEtch) technique. This photodiode shows both reduced dark current and enhanced responsivity at near infrared (NIR) wavelength ranges.
| Original language | English (US) |
|---|---|
| Title of host publication | 2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| ISBN (Electronic) | 9781943580576 |
| DOIs | |
| State | Published - May 2019 |
| Event | 2019 Conference on Lasers and Electro-Optics, CLEO 2019 - San Jose, United States Duration: May 5 2019 → May 10 2019 |
Publication series
| Name | 2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings |
|---|
Conference
| Conference | 2019 Conference on Lasers and Electro-Optics, CLEO 2019 |
|---|---|
| Country | United States |
| City | San Jose |
| Period | 5/5/19 → 5/10/19 |
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ASJC Scopus subject areas
- Spectroscopy
- Industrial and Manufacturing Engineering
- Safety, Risk, Reliability and Quality
- Management, Monitoring, Policy and Law
- Electronic, Optical and Magnetic Materials
- Radiology Nuclear Medicine and imaging
- Instrumentation
- Atomic and Molecular Physics, and Optics
Cite this
Germanium photodiodes on pyramidal textured surface by Metal-Assisted Chemical Etching. / Kim, Munho; Yi, Soongyu; Kim, Jeong Dong; Yin, Xin; Li, Jun; Bong, Jihye; Liu, Dong; Liu, Shih Chia; Kvit, Alexander; Zhou, Weidong; Wang, Xudong; Yu, Zongfu; Ma, Zhenqiang; Li, Xiuling.
2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. 8749589 (2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings).Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Germanium photodiodes on pyramidal textured surface by Metal-Assisted Chemical Etching
AU - Kim, Munho
AU - Yi, Soongyu
AU - Kim, Jeong Dong
AU - Yin, Xin
AU - Li, Jun
AU - Bong, Jihye
AU - Liu, Dong
AU - Liu, Shih Chia
AU - Kvit, Alexander
AU - Zhou, Weidong
AU - Wang, Xudong
AU - Yu, Zongfu
AU - Ma, Zhenqiang
AU - Li, Xiuling
PY - 2019/5
Y1 - 2019/5
N2 - We demonstrate a Ge photodiode on pyramidal textured surface by Metal-Assisted Chemical Etching (MacEtch) technique. This photodiode shows both reduced dark current and enhanced responsivity at near infrared (NIR) wavelength ranges.
AB - We demonstrate a Ge photodiode on pyramidal textured surface by Metal-Assisted Chemical Etching (MacEtch) technique. This photodiode shows both reduced dark current and enhanced responsivity at near infrared (NIR) wavelength ranges.
UR - http://www.scopus.com/inward/record.url?scp=85069203251&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85069203251&partnerID=8YFLogxK
U2 - 10.23919/CLEO.2019.8749589
DO - 10.23919/CLEO.2019.8749589
M3 - Conference contribution
AN - SCOPUS:85069203251
T3 - 2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings
BT - 2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
ER -