Germanium photodiodes on pyramidal textured surface by Metal-Assisted Chemical Etching

Munho Kim, Soongyu Yi, Jeong Dong Kim, Xin Yin, Jun Li, Jihye Bong, Dong Liu, Shih Chia Liu, Alexander Kvit, Weidong Zhou, Xudong Wang, Zongfu Yu, Zhenqiang Ma, Xiuling Li

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We demonstrate a Ge photodiode on pyramidal textured surface by Metal-Assisted Chemical Etching (MacEtch) technique. This photodiode shows both reduced dark current and enhanced responsivity at near infrared (NIR) wavelength ranges.

Original languageEnglish (US)
Title of host publication2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781943580576
DOIs
StatePublished - May 2019
Event2019 Conference on Lasers and Electro-Optics, CLEO 2019 - San Jose, United States
Duration: May 5 2019May 10 2019

Publication series

Name2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings

Conference

Conference2019 Conference on Lasers and Electro-Optics, CLEO 2019
CountryUnited States
CitySan Jose
Period5/5/195/10/19

Fingerprint

Germanium
germanium
etching
Photodiodes
photodiodes
Etching
near infrared
Metals
wavelength
Dark currents
metal
dark current
metals
Infrared radiation
Wavelength
wavelengths
chemical

ASJC Scopus subject areas

  • Spectroscopy
  • Industrial and Manufacturing Engineering
  • Safety, Risk, Reliability and Quality
  • Management, Monitoring, Policy and Law
  • Electronic, Optical and Magnetic Materials
  • Radiology Nuclear Medicine and imaging
  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Cite this

Kim, M., Yi, S., Kim, J. D., Yin, X., Li, J., Bong, J., ... Li, X. (2019). Germanium photodiodes on pyramidal textured surface by Metal-Assisted Chemical Etching. In 2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings [8749589] (2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.23919/CLEO.2019.8749589

Germanium photodiodes on pyramidal textured surface by Metal-Assisted Chemical Etching. / Kim, Munho; Yi, Soongyu; Kim, Jeong Dong; Yin, Xin; Li, Jun; Bong, Jihye; Liu, Dong; Liu, Shih Chia; Kvit, Alexander; Zhou, Weidong; Wang, Xudong; Yu, Zongfu; Ma, Zhenqiang; Li, Xiuling.

2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. 8749589 (2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Kim, M, Yi, S, Kim, JD, Yin, X, Li, J, Bong, J, Liu, D, Liu, SC, Kvit, A, Zhou, W, Wang, X, Yu, Z, Ma, Z & Li, X 2019, Germanium photodiodes on pyramidal textured surface by Metal-Assisted Chemical Etching. in 2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings., 8749589, 2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings, Institute of Electrical and Electronics Engineers Inc., 2019 Conference on Lasers and Electro-Optics, CLEO 2019, San Jose, United States, 5/5/19. https://doi.org/10.23919/CLEO.2019.8749589
Kim M, Yi S, Kim JD, Yin X, Li J, Bong J et al. Germanium photodiodes on pyramidal textured surface by Metal-Assisted Chemical Etching. In 2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2019. 8749589. (2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings). https://doi.org/10.23919/CLEO.2019.8749589
Kim, Munho ; Yi, Soongyu ; Kim, Jeong Dong ; Yin, Xin ; Li, Jun ; Bong, Jihye ; Liu, Dong ; Liu, Shih Chia ; Kvit, Alexander ; Zhou, Weidong ; Wang, Xudong ; Yu, Zongfu ; Ma, Zhenqiang ; Li, Xiuling. / Germanium photodiodes on pyramidal textured surface by Metal-Assisted Chemical Etching. 2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. (2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings).
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abstract = "We demonstrate a Ge photodiode on pyramidal textured surface by Metal-Assisted Chemical Etching (MacEtch) technique. This photodiode shows both reduced dark current and enhanced responsivity at near infrared (NIR) wavelength ranges.",
author = "Munho Kim and Soongyu Yi and Kim, {Jeong Dong} and Xin Yin and Jun Li and Jihye Bong and Dong Liu and Liu, {Shih Chia} and Alexander Kvit and Weidong Zhou and Xudong Wang and Zongfu Yu and Zhenqiang Ma and Xiuling Li",
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