Abstract
We demonstrate a Ge photodiode on pyramidal textured surface by Metal-Assisted Chemical Etching (MacEtch) technique. This photodiode shows both reduced dark current and enhanced responsivity at near infrared (NIR) wavelength ranges.
| Original language | English (US) |
|---|---|
| Title of host publication | 2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| ISBN (Electronic) | 9781943580576 |
| DOIs | |
| State | Published - May 2019 |
| Event | 2019 Conference on Lasers and Electro-Optics, CLEO 2019 - San Jose, United States Duration: May 5 2019 → May 10 2019 |
Publication series
| Name | 2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings |
|---|
Conference
| Conference | 2019 Conference on Lasers and Electro-Optics, CLEO 2019 |
|---|---|
| Country | United States |
| City | San Jose |
| Period | 5/5/19 → 5/10/19 |
ASJC Scopus subject areas
- Spectroscopy
- Industrial and Manufacturing Engineering
- Safety, Risk, Reliability and Quality
- Management, Monitoring, Policy and Law
- Electronic, Optical and Magnetic Materials
- Radiology Nuclear Medicine and imaging
- Instrumentation
- Atomic and Molecular Physics, and Optics
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Cite this
Kim, M., Yi, S., Kim, J. D., Yin, X., Li, J., Bong, J., Liu, D., Liu, S. C., Kvit, A., Zhou, W., Wang, X., Yu, Z., Ma, Z., & Li, X. (2019). Germanium photodiodes on pyramidal textured surface by Metal-Assisted Chemical Etching. In 2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings [8749589] (2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.23919/CLEO.2019.8749589