Geometry effect on the strain-induced self-rolling of semiconductor membranes

Ik Su Chun, Archana Challa, Brad Derickson, K Jimmy Hsia, Xiuling Li

Research output: Contribution to journalArticle

Abstract

Semiconductor micro- and nanotubes can be formed by strain-induced self-rolling of membranes. The effect of geometrical dimensions on the self-rolling behavior of epitaxial mismatch-strained InxGa 1-xAs-GaAs membranes are systematically studied both experimentally and theoretically using the finite element method. The final rolling direction depends on the length and width of the membrane as well as the diameter of the rolled-up tube. The energetics of the final states, the history of rolling process, and the kinetic control of the etching anisotropy ultimately determine the rolling behavior. Results reported here provide critical information for precise positioning and uniform large area assembly of semiconducting micro- and nanotubes for applications in photonics, microelectromechanical systems, etc.

Original languageEnglish (US)
Pages (from-to)3927-3932
Number of pages6
JournalNano letters
Volume10
Issue number10
DOIs
StatePublished - Oct 13 2010
Externally publishedYes

Keywords

  • finite element method
  • GaAs MOCVD
  • semiconductor micro- and nanotubes
  • Strain-induced self-rolling

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Bioengineering
  • Chemistry(all)
  • Materials Science(all)
  • Mechanical Engineering

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