The authors discuss the first use of a ZnO-on-Si SAW resonator as a gas sensor. In particular, the sensitivity of the device to organic vapors is examined. The planar nature of the surface acoustic wave (SAW) device, in which the acoustic energy is confined to within roughly one acoustic wavelength of the surface, makes the device extremely sensitive to surface perturbations. This characteristic has been exploited in the construction of SAW gas sensors in which the surface wave propagation characteristics are altered by species adsorbed from the ambient gas phase. The ZnO-on-Si resonator is fabricated on a silicon substrate, using a piezoelectric ZnO overlay of 0. 7- mu m thickness to permit transconduction between electrical and acoustic energy. Surface features include aluminum interdigital transducers and etched-groove reflector arrays, both defined by standard photolithography. 9 refs.
|Original language||English (US)|
|Title of host publication||Unknown Host Publication Title|
|Number of pages||3|
|State||Published - Dec 1 1985|
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