GAS SENSING WITH SURFACE ACOUSTIC WAVE DEVICES.

S. J. Martin, Kenneth S Schweizer, A. J. Ricco, T. E. Zipperian

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The authors discuss the first use of a ZnO-on-Si SAW resonator as a gas sensor. In particular, the sensitivity of the device to organic vapors is examined. The planar nature of the surface acoustic wave (SAW) device, in which the acoustic energy is confined to within roughly one acoustic wavelength of the surface, makes the device extremely sensitive to surface perturbations. This characteristic has been exploited in the construction of SAW gas sensors in which the surface wave propagation characteristics are altered by species adsorbed from the ambient gas phase. The ZnO-on-Si resonator is fabricated on a silicon substrate, using a piezoelectric ZnO overlay of 0. 7- mu m thickness to permit transconduction between electrical and acoustic energy. Surface features include aluminum interdigital transducers and etched-groove reflector arrays, both defined by standard photolithography. 9 refs.

Original languageEnglish (US)
Title of host publicationUnknown Host Publication Title
PublisherIEEE
Pages71-73
Number of pages3
StatePublished - Dec 1 1985
Externally publishedYes

Fingerprint

Acoustic surface wave devices
Surface waves
Acoustics
Chemical sensors
Resonators
Gases
Acoustic waves
Photolithography
Wave propagation
Transducers
Vapors
Aluminum
Silicon
Wavelength
Substrates

ASJC Scopus subject areas

  • Engineering(all)

Cite this

Martin, S. J., Schweizer, K. S., Ricco, A. J., & Zipperian, T. E. (1985). GAS SENSING WITH SURFACE ACOUSTIC WAVE DEVICES. In Unknown Host Publication Title (pp. 71-73). IEEE.

GAS SENSING WITH SURFACE ACOUSTIC WAVE DEVICES. / Martin, S. J.; Schweizer, Kenneth S; Ricco, A. J.; Zipperian, T. E.

Unknown Host Publication Title. IEEE, 1985. p. 71-73.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Martin, SJ, Schweizer, KS, Ricco, AJ & Zipperian, TE 1985, GAS SENSING WITH SURFACE ACOUSTIC WAVE DEVICES. in Unknown Host Publication Title. IEEE, pp. 71-73.
Martin SJ, Schweizer KS, Ricco AJ, Zipperian TE. GAS SENSING WITH SURFACE ACOUSTIC WAVE DEVICES. In Unknown Host Publication Title. IEEE. 1985. p. 71-73
Martin, S. J. ; Schweizer, Kenneth S ; Ricco, A. J. ; Zipperian, T. E. / GAS SENSING WITH SURFACE ACOUSTIC WAVE DEVICES. Unknown Host Publication Title. IEEE, 1985. pp. 71-73
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