@inproceedings{a0e37bb5eb81490d90bf5048ee4ff513,
title = "GAS PHASE SPECTROSCOPY OF A Ge FILM LCVD REACTOR.",
abstract = "The gas phase photochemistry of an LCVD reactor used to grow polycrystalline Ge films was studied by absorption and emission spectroscopy. Spatially, spectrally and temporally resolved atomic and molecular emissions are monitored as a function of gas pressure and laser intensity. These data lead to the conclusion that GeH//2 is predominantly produced directly from GeH//4.",
author = "Osmundsen, {J. F.} and Abele, {C. C.} and Eden, {J. G.}",
year = "1984",
language = "English (US)",
isbn = "0444008942",
series = "Materials Research Society Symposia Proceedings",
publisher = "North-Holland",
pages = "259--267",
editor = "A.Wayne Johnson and Ehrlich, {Daniel J.} and Schlossberg, {Howard R.}",
booktitle = "Materials Research Society Symposia Proceedings",
}