Fundamental concepts of Ion-Beam processing

Research output: Chapter in Book/Report/Conference proceedingChapter


The basic concepts underlying the response of materials to ion-beam irradiation are outlined. These include the slowing of energetic ions, the creation of defects, sputtering, ion-beam mixing, the acceleration of kinetic processes, and phase transformations. Several examples are cited to illustrate how each of these concepts can be exploited to modify materials in ways not easily achieved, or not even possible, by more conventional processing methods. The chapter attempts to provide a physical understanding of the basic effects of ion-beam irradiation on materials, to enable readers in other areas of research to better understand the more technical chapters that follow, and to develop ideas relevant to their own disciplines. We provide references to more quantitative treatments of the topics covered here.

Original languageEnglish (US)
Title of host publicationMaterials Science with Ion Beams
EditorsHarry Bernas
Number of pages28
StatePublished - 2010

Publication series

NameTopics in Applied Physics
ISSN (Print)0303-4216
ISSN (Electronic)1437-0859

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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