FUNDAMENTAL ASPECTS OF ION BEAM SURFACE MODIFICATION: DEFECT PRODUCTION AND MIGRATION PROCESSES.

L. E. Rehn, R. S. Averback, P. R. Okamoto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Several defect production and migration mechanisms contribute to changes in the near-surface composition of an alloy during ion bombardment, e. g. atoms exchange positions via displacements and replacement sequences, preferential sputtering effects arise, and radiation-enhanced diffusion and radiation-induced segregation occur. The last two defect migration mechanisms are of particular significance since they can alter the composition to depths which are much greater than the implanted ion range.

Original languageEnglish (US)
Title of host publicationUnknown Host Publication Title
EditorsGerhard K. Wolf, William Alexander Grant, R.P.M. Proctor
PublisherElsevier Sequoia SA
Pages1-11
Number of pages11
ISBN (Print)0444750347
StatePublished - 1985
Externally publishedYes

ASJC Scopus subject areas

  • General Engineering

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