Frequency-dependent electrical and thermal response of heated atomic force microscope cantilevers

Keunhan Park; Jungchul Lee; Zhuomin M. Zhang; William P. King

doi:10.1109/JMEMS.2006.889498

Frequency-dependent electrical and thermal response of heated atomic force microscope cantilevers

Keunhan Park, Jungchul Lee, Zhuomin M. Zhang, William P. King

Research output: Contribution to journal › Article › peer-review

Abstract

This paper investigates the electrical and thermal response of the heated atomic force microscope (AFM) cantilevers in the frequency range from 10 Hz to 1 MHz. Spectrum analysis of the cantilever voltage response to periodic heating distinguishes different thermal behaviors of the cantilever in the frequency domain: the cantilever voltage at low frequencies is modulated by higher-order harmonics, and at high frequencies it oscillates with 1-ω only. A simple model facilitates the understanding of complicated electrical and thermal behaviors in the cantilever, thus, it is possible to determine the cantilever temperature. The calculation predicts that temperature oscillation is restricted to the heater region when the cantilever is operated at about 10 kHz, suggesting that the periodic-heating operation of the cantilever may be employed for highly sensitive thermal metrology.

Original language	English (US)
Pages (from-to)	213-222
Number of pages	10
Journal	Journal of Microelectromechanical Systems
Volume	16
Issue number	2
DOIs	https://doi.org/10.1109/JMEMS.2006.889498
State	Published - Apr 2007

Keywords

Atomic force microscopy (AFM)
Electric variables measurement
Frequency response
Raman spectroscopy

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

Online availability

10.1109/JMEMS.2006.889498

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title = "Frequency-dependent electrical and thermal response of heated atomic force microscope cantilevers",

abstract = "This paper investigates the electrical and thermal response of the heated atomic force microscope (AFM) cantilevers in the frequency range from 10 Hz to 1 MHz. Spectrum analysis of the cantilever voltage response to periodic heating distinguishes different thermal behaviors of the cantilever in the frequency domain: the cantilever voltage at low frequencies is modulated by higher-order harmonics, and at high frequencies it oscillates with 1-ω only. A simple model facilitates the understanding of complicated electrical and thermal behaviors in the cantilever, thus, it is possible to determine the cantilever temperature. The calculation predicts that temperature oscillation is restricted to the heater region when the cantilever is operated at about 10 kHz, suggesting that the periodic-heating operation of the cantilever may be employed for highly sensitive thermal metrology.",

keywords = "Atomic force microscopy (AFM), Electric variables measurement, Frequency response, Raman spectroscopy",

author = "Keunhan Park and Jungchul Lee and Zhang, {Zhuomin M.} and King, {William P.}",

note = "Funding Information: Manuscript received February 6, 2006; revised July 20, 2006. This work was supported by the National Science Foundation under Grants CTS-0327117 and CAREER CTS-0338888. Subject Editor N. de Roojj.",

year = "2007",

month = apr,

doi = "10.1109/JMEMS.2006.889498",

language = "English (US)",

volume = "16",

pages = "213--222",

journal = "Journal of Microelectromechanical Systems",

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publisher = "Institute of Electrical and Electronics Engineers Inc.",

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AU - Park, Keunhan

AU - Lee, Jungchul

AU - Zhang, Zhuomin M.

AU - King, William P.

N1 - Funding Information: Manuscript received February 6, 2006; revised July 20, 2006. This work was supported by the National Science Foundation under Grants CTS-0327117 and CAREER CTS-0338888. Subject Editor N. de Roojj.

PY - 2007/4

Y1 - 2007/4

N2 - This paper investigates the electrical and thermal response of the heated atomic force microscope (AFM) cantilevers in the frequency range from 10 Hz to 1 MHz. Spectrum analysis of the cantilever voltage response to periodic heating distinguishes different thermal behaviors of the cantilever in the frequency domain: the cantilever voltage at low frequencies is modulated by higher-order harmonics, and at high frequencies it oscillates with 1-ω only. A simple model facilitates the understanding of complicated electrical and thermal behaviors in the cantilever, thus, it is possible to determine the cantilever temperature. The calculation predicts that temperature oscillation is restricted to the heater region when the cantilever is operated at about 10 kHz, suggesting that the periodic-heating operation of the cantilever may be employed for highly sensitive thermal metrology.

AB - This paper investigates the electrical and thermal response of the heated atomic force microscope (AFM) cantilevers in the frequency range from 10 Hz to 1 MHz. Spectrum analysis of the cantilever voltage response to periodic heating distinguishes different thermal behaviors of the cantilever in the frequency domain: the cantilever voltage at low frequencies is modulated by higher-order harmonics, and at high frequencies it oscillates with 1-ω only. A simple model facilitates the understanding of complicated electrical and thermal behaviors in the cantilever, thus, it is possible to determine the cantilever temperature. The calculation predicts that temperature oscillation is restricted to the heater region when the cantilever is operated at about 10 kHz, suggesting that the periodic-heating operation of the cantilever may be employed for highly sensitive thermal metrology.

KW - Atomic force microscopy (AFM)

KW - Electric variables measurement

KW - Frequency response

KW - Raman spectroscopy

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JF - Journal of Microelectromechanical Systems

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Frequency-dependent electrical and thermal response of heated atomic force microscope cantilevers

Abstract

Keywords

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