@inproceedings{b487e91e5f56446b93bbdcaeb0fe337b,
title = "Fractional-N PLL-Based Micro-Oven Control for Ultra-Stable MEMS Frequency References",
abstract = "This paper presents a fully integrated micro-oven temperature compensation method for dual-mode MEMS oscillators using a fractional-N PLL. By locking two temperature-dependent modes and driving the micro-heater with an amplitude-modulated signal, the system achieves a 2 ppb/°C TCF and sub-ppb Allan deviation while remaining fully CMOS compatible. A 65-nm prototype shows a three-order-of-magnitude improvement over previous work and offers a general framework for oscillator stabilization using temperature information encoded in frequency.",
keywords = "Allan deviation, MEMS oscillator, Oven-controlled oscillator, TCF",
author = "Karim Elmeligy and Rakibul Islam and Jintark Kim and Younis, \{Mohamed Badr\} and Jie Yan and Jiawei Yang and Gabrielle Vukasin and Kwon, \{Hyun Keun\} and Kenny, \{Thomas W.\} and Gaurav Bahl and Hanumolu, \{Pavan Kumar\}",
note = "Publisher Copyright: {\textcopyright} 2026 IEEE.; 46th Annual IEEE Custom Integrated Circuits Conference, CICC 2026 ; Conference date: 19-04-2026 Through 23-04-2026",
year = "2026",
doi = "10.1109/CICC65509.2026.11509576",
language = "English (US)",
series = "Proceedings of the Custom Integrated Circuits Conference",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2026 IEEE Custom Integrated Circuits Conference, CICC 2026 - Proceedings",
address = "United States",
}