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Fractional-N PLL-Based Micro-Oven Control for Ultra-Stable MEMS Frequency References

  • Karim Elmeligy
  • , Rakibul Islam
  • , Jintark Kim
  • , Mohamed Badr Younis
  • , Jie Yan
  • , Jiawei Yang
  • , Gabrielle Vukasin
  • , Hyun Keun Kwon
  • , Thomas W. Kenny
  • , Gaurav Bahl
  • , Pavan Kumar Hanumolu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a fully integrated micro-oven temperature compensation method for dual-mode MEMS oscillators using a fractional-N PLL. By locking two temperature-dependent modes and driving the micro-heater with an amplitude-modulated signal, the system achieves a 2 ppb/°C TCF and sub-ppb Allan deviation while remaining fully CMOS compatible. A 65-nm prototype shows a three-order-of-magnitude improvement over previous work and offers a general framework for oscillator stabilization using temperature information encoded in frequency.

Original languageEnglish (US)
Title of host publication2026 IEEE Custom Integrated Circuits Conference, CICC 2026 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9798331572105
DOIs
StatePublished - 2026
Event46th Annual IEEE Custom Integrated Circuits Conference, CICC 2026 - Seattle, United States
Duration: Apr 19 2026Apr 23 2026

Publication series

NameProceedings of the Custom Integrated Circuits Conference
ISSN (Print)0886-5930

Conference

Conference46th Annual IEEE Custom Integrated Circuits Conference, CICC 2026
Country/TerritoryUnited States
CitySeattle
Period4/19/264/23/26

Keywords

  • Allan deviation
  • MEMS oscillator
  • Oven-controlled oscillator
  • TCF

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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