Focused ion beam post-processing for single mode photonic crystal vertical cavity surface-emitting lasers

A. J. Danner, N. Yokouchi, J. J. Raftery, K. D. Choquette

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, we present the first photonic crystal VCSELs fabricated using FIBE method whereby photonic crystal holes can be etched into prefabricated VCSELs.

Original languageEnglish (US)
Title of host publication61st Device Research Conference, DRC 2003 - Conference Digest
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages155-156
Number of pages2
ISBN (Electronic)0780377273
DOIs
StatePublished - 2003
Event61st Device Research Conference, DRC 2003 - Salt Lake City, United States
Duration: Jun 23 2003Jun 25 2003

Publication series

NameDevice Research Conference - Conference Digest, DRC
Volume2003-January
ISSN (Print)1548-3770

Other

Other61st Device Research Conference, DRC 2003
Country/TerritoryUnited States
CitySalt Lake City
Period6/23/036/25/03

Keywords

  • Crystalline materials
  • Etching
  • Ion beams
  • Laser modes
  • Lattices
  • Optical materials
  • Photonic crystals
  • Silicon compounds
  • Surface emitting lasers
  • Vertical cavity surface emitting lasers

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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