We report the electric field and pH sensitivity of fluid gated metal-semiconductor hybrid (MSH) Schottky structures consisting of a Titanium layer on n-type GaAs. Compared to standard field-effect sensors, the MSH Schottky structures are 21 times more sensitive to electric field of -46.6 V/cm and show about six times larger resistance change as pH of the solution is decreased from 8.17 to 5.54. The potential change at the fluidic gate and passivation layer interface by bias voltages and pH are mirrored by the metal shunt, resulting in larger depletion widths under the Schottky junction and resistance change as compared to sensors with no Schottky junction. 2D numerical simulation results are in good agreement with the measured data and suggest thinner mesa with lower doping density can further increase device sensitivity.

Original languageEnglish (US)
Pages (from-to)849-854
Number of pages6
JournalBiomedical microdevices
Issue number5
StatePublished - Oct 2010


  • Electric field sensing
  • Field effect biosensor
  • Fluidic measurement
  • Schottky junction

ASJC Scopus subject areas

  • Biomedical Engineering
  • Molecular Biology


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