@inproceedings{db4b5d7e3a2e4ee19aab7e39055bcd10,
title = "Finding defects in a 22 nm node wafer with visible light",
abstract = "Despite a diffraction limited lateral resolution of 360 nm, we detected 20 nm by 110 nm defects in a patterned 22 nm node wafer using quantitative phase and amplitude images from epi-illumination diffraction phase microscopy.",
author = "Renjie Zhou and Gabriel Popescu and Goddard, {Lynford L.}",
year = "2013",
doi = "10.1364/cleo_si.2013.af2j.2",
language = "English (US)",
isbn = "9781557529725",
series = "CLEO: Science and Innovations, CLEO_SI 2013",
publisher = "Optical Society of America (OSA)",
pages = "AF2J.2",
booktitle = "CLEO",
note = "CLEO: Science and Innovations, CLEO_SI 2013 ; Conference date: 09-06-2013 Through 14-06-2013",
}