@inproceedings{427c63c0abca424c9b06d793467816c1,
title = "Finding defects in a 22 nm node wafer with visible light",
abstract = "Despite a diffraction limited lateral resolution of 360 nm, we detected 20 nm by 110 nm defects in a patterned 22 nm node wafer using quantitative phase and amplitude images from epiillumination diffraction phase microscopy.",
author = "Renjie Zhou and Gabriel Popescu and Goddard, {Lynford L.}",
year = "2013",
doi = "10.1364/cleo_at.2013.af2j.2",
language = "English (US)",
isbn = "9781557529725",
series = "2013 Conference on Lasers and Electro-Optics, CLEO 2013",
publisher = "IEEE Computer Society",
booktitle = "2013 Conference on Lasers and Electro-Optics, CLEO 2013",
note = "2013 Conference on Lasers and Electro-Optics, CLEO 2013 ; Conference date: 09-06-2013 Through 14-06-2013",
}