Keyphrases
Chemical Vapor Deposition
100%
Predictive Modeling
100%
Superconformal
100%
High Aspect Ratio Trenches
100%
Complete Filling
80%
Aspect Ratio
60%
Growth Rate
60%
Species Transport
60%
Sidewall
40%
Transport Model
40%
Ballistic Transport
40%
Taper Angle
40%
Flux Distribution
20%
Incident Flux
20%
Small Sets
20%
Computationally Efficient
20%
Dynamic Process
20%
Kinetic Coefficients
20%
Glancing Angle
20%
Depositional System
20%
Coating Profile
20%
Matrix Manipulation
20%
Conformal Coating
20%
Partial Pressure
20%
Reaction-diffusion Equations
20%
One-cycle
20%
Conformal Growth
20%
Line-of-sight
20%
Filling Process
20%
Coating Process
20%
V-shaped
20%
Re-emission
20%
Long-range Transport
20%
Coreactant
20%
Steady-state Flux
20%
All-position
20%
Distribution Rate
20%
Diffusion-reaction Model
20%
Internal Surface
20%
Variable Range
20%
Species Diffusion
20%
Effective Aspect Ratio
20%
Nominal Aspect
20%
Flux Growth
20%
Variable Taper
20%
Nanotechnology Fabrication
20%
Law of Cosines
20%
Engineering
Chemical Vapor Deposition
100%
Vapor Deposition
100%
Aspect Ratio
100%
High Aspect Ratio
100%
Side Wall
50%
Taper Angle
50%
Dynamic Process
25%
Glancing Angle
25%
Reactant
25%
Deposition System
25%
Reaction-Diffusion Model
25%
Conformal Coating
25%
Partial Pressure
25%
Reaction Equation
25%
Range Variable
25%
Kinetic Coefficient
25%
Internal Surface
25%
Filling Process
25%
Nanotechnology Fabrication
25%
Chemical Engineering
Vapor Deposition
100%
Chemical Vapor Deposition
100%
Material Science
Chemical Vapor Deposition
100%