Figure-of-merit enhancement for laterally vibrating lithium niobate mems resonators

Songbin Gong, Gianluca Piazza

Research output: Contribution to journalArticle

Abstract

This paper reports on figure-of-merit (FoM) enhancement techniques for a new class of lithium niobate (LN)-based microelectromechanical systems laterally vibrating resonators (LVRs). A weighted electrode configuration is used to experimentally demonstrate a more than 2× enhancement for the device electromechanical coupling k2t , and an optimized reactive ion etch is used to attain straighter LN sidewalls and subsequently a 3× improvement in quality factor (Q = 1300). As a result, the resonators orientated 30° to +y in the x-cut plane exhibited a k2t of 21.7%, and a quality factor of 1300, effectively corresponding to an FoM of 280-the highest demonstrated to date for LVRs. These devices are expected to provide an unprecedented and unmatched platform for frequency-agile and adaptive RF filtering technology.

Original languageEnglish (US)
Article number6619408
Pages (from-to)3888-3894
Number of pages7
JournalIEEE Transactions on Electron Devices
Volume60
Issue number11
DOIs
StatePublished - Oct 16 2013
Externally publishedYes

Keywords

  • Figure of merit (FoM)
  • high electromechanical coupling
  • laterally vibrating resonators (LVRs)
  • lithium niobate (LN)
  • piezoelectric
  • wideband filters

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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