Abstract
This paper reports on figure-of-merit (FoM) enhancement techniques for a new class of lithium niobate (LN)-based microelectromechanical systems laterally vibrating resonators (LVRs). A weighted electrode configuration is used to experimentally demonstrate a more than 2× enhancement for the device electromechanical coupling k2t , and an optimized reactive ion etch is used to attain straighter LN sidewalls and subsequently a 3× improvement in quality factor (Q = 1300). As a result, the resonators orientated 30° to +y in the x-cut plane exhibited a k2t of 21.7%, and a quality factor of 1300, effectively corresponding to an FoM of 280-the highest demonstrated to date for LVRs. These devices are expected to provide an unprecedented and unmatched platform for frequency-agile and adaptive RF filtering technology.
| Original language | English (US) |
|---|---|
| Article number | 6619408 |
| Pages (from-to) | 3888-3894 |
| Number of pages | 7 |
| Journal | IEEE Transactions on Electron Devices |
| Volume | 60 |
| Issue number | 11 |
| DOIs | |
| State | Published - 2013 |
| Externally published | Yes |
Keywords
- Figure of merit (FoM)
- high electromechanical coupling
- laterally vibrating resonators (LVRs)
- lithium niobate (LN)
- piezoelectric
- wideband filters
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering