Feedback scheme for improved lateral force measurement in atomic force microscopy

A. Shegaonkar, C. Lee, S. Salapaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution


This paper proposes a signal based on a feedback scheme that gives a measure of lateral forces in atomic force microscopy. This measure, unlike the typically used lateral deflection signal, is not corrupted by the geometrical crosstalk between the normal and lateral signals, accounts for inertial forces experienced by the cantilevers during scans, and misinterpretations due to irregular sliding. This measure varies linearly with the lateral forces for a larger range of forces and scanning bandwidth than the lateral deflection signal. The sensing bandwidth depends on the control design for the feedback scheme. We also present the design of an actuator that enables the lateral feedback scheme. Experimental results are presented that show the inaccuracies in the lateral deflection method for lateral measurement and how these are addressed by the feedback scheme.

Original languageEnglish (US)
Title of host publication2008 American Control Conference, ACC
Number of pages6
StatePublished - Sep 30 2008
Event2008 American Control Conference, ACC - Seattle, WA, United States
Duration: Jun 11 2008Jun 13 2008

Publication series

NameProceedings of the American Control Conference
ISSN (Print)0743-1619


Other2008 American Control Conference, ACC
Country/TerritoryUnited States
CitySeattle, WA

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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