TY - GEN
T1 - Fast scanning of X-Ray optics
T2 - 31st Annual Meeting of the American Society for Precision Engineering, ASPE 2016
AU - Mashrafi, Sheikh T.
AU - Preissner, Curt
AU - Salapaka, Srinivasa M.
PY - 2016
Y1 - 2016
N2 - The paper shows the making of an X-Ray microscope that reflects the requirements of the APS upgrade. The identification of the diagonal and the off-diagonal stages of the PI XYZ stages are detailed. The controller for diagonal XX-stage shows good tracking performance. The hysteresis and resolution experiments are not shown here. The parametric model fitting, controller design, and controller implementation for the remaining SISO diagonal stages and MIMO stage will be carried on in the usual manner and presented in subsequent articles.
AB - The paper shows the making of an X-Ray microscope that reflects the requirements of the APS upgrade. The identification of the diagonal and the off-diagonal stages of the PI XYZ stages are detailed. The controller for diagonal XX-stage shows good tracking performance. The hysteresis and resolution experiments are not shown here. The parametric model fitting, controller design, and controller implementation for the remaining SISO diagonal stages and MIMO stage will be carried on in the usual manner and presented in subsequent articles.
UR - http://www.scopus.com/inward/record.url?scp=85009080969&partnerID=8YFLogxK
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M3 - Conference contribution
AN - SCOPUS:85009080969
T3 - Proceedings - ASPE 2016 Annual Meeting
SP - 97
EP - 102
BT - Proceedings - ASPE 2016 Annual Meeting
PB - American Society for Precision Engineering, ASPE
Y2 - 23 October 2016 through 28 October 2016
ER -