@inproceedings{d0b6b1d3b06f4121a31f7db49ad10d84,
title = "Far-field light scattering from sub-wavelength wafer patterns using a parallel FETI-DP algorithm",
abstract = "The dual-primal finite-element and interconnecting algorithm (FETI-DP) is efficiently applied in parallel to compute the far-field scattering from a wafer with sub-wavelength patterns. As a nonoverlapping domain decomposition method for solving large-scale problems, the FETI-DP algorithm formulates a global interface problem, whose iterative solution is accelerated by solving a global corner problem. To maintain good parallel scaling efficiency, global communication is minimized by using an iterative classical Gram-Schmidt scheme for the global interface problem and a communication-avoiding approach for the global corner problem. In addition, a preconditioner for the corner system matrix is implemented to improve iterative convergence. After computing the far-field data, digital postprocessing is used to remove the background signal and improve the detection sensitivity of isolated defects.",
author = "Kedi Zhang and Jinlong Zhu and Goddard, {Lynford L.} and Jin, {Jian Ming}",
year = "2016",
month = oct,
day = "25",
doi = "10.1109/APS.2016.7696711",
language = "English (US)",
series = "2016 IEEE Antennas and Propagation Society International Symposium, APSURSI 2016 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "2009--2010",
booktitle = "2016 IEEE Antennas and Propagation Society International Symposium, APSURSI 2016 - Proceedings",
address = "United States",
note = "2016 IEEE Antennas and Propagation Society International Symposium, APSURSI 2016 ; Conference date: 26-06-2016 Through 01-07-2016",
}