Failure of micron scale single crystal silicon bars due to torsion developed by MEMS micro instruments

M Taher A Saif, N. C. MacDonald

Research output: Contribution to journalConference article

Abstract

A single crystal silicon (SCS) bar subjected to pure torsion using MicroElectroMechanical Systems (MEMS) micro instruments is experimentally studied. The bar is in the form of a pillar, anchored at one end to the silicon substrate and the other end to a lever arm. With the application of forces by the two micro instruments, a torque is generated which twists the pillar. The angular twist at different applied voltages are recorded using an angular scale. The corresponding torques are determined from the calibration parameters of the actuators. Torque is applied until the pillar fractures. In two samples designated as 1 and 2, it is found that both the pillars behave linearly until failure. The stresses prior to fracture are evaluated based on anisotropic theory of elasticity. Samples 1 and 2 fail at shear stresses of 5.6 and 2.6 GPa. The fracture surfaces coincide with the (111) plane of SCS.

Original languageEnglish (US)
Pages (from-to)45-49
Number of pages5
JournalMaterials Research Society Symposium - Proceedings
Volume518
StatePublished - Dec 1 1998
EventProceedings of the 1998 MRS Spring Symposium - San Francisco, CA, USA
Duration: Apr 15 1998Apr 16 1998

Fingerprint

Silicon
Torsional stress
microelectromechanical systems
MEMS
torsion
torque
Torque
Single crystals
single crystals
silicon
levers
shear stress
Shear stress
Elasticity
Actuators
elastic properties
actuators
Calibration
Electric potential
electric potential

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

Cite this

Failure of micron scale single crystal silicon bars due to torsion developed by MEMS micro instruments. / Saif, M Taher A; MacDonald, N. C.

In: Materials Research Society Symposium - Proceedings, Vol. 518, 01.12.1998, p. 45-49.

Research output: Contribution to journalConference article

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