Fabrication technology of Si microfluidic devices for microbial cell trapping

Ramana Murthy Badam, Liang Zhu, Cheng Yong Teo, Xueli Peh, Hongmiao Ji, Hanhua Feng, Wen Tso Liu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report fabrication technology for micro fluidic filter device with fine and high aspect ratio filtration gap using single-mask and CMOS compatible process flow. Advantage of Si based Microfabrication platform technology has been fully exploited by adopting manufacture-able process flow. A novel approach of combining silicon deep reactive ion etch (RIE) capability with subsequent gap-fill engineering enabled achieve wide range of filtration gaps of deep sub-micron size with high aspect ratios of >200. This approach eliminated the need to use high-end lithography techniques in order to achieve deep sub-micron gaps after pattern transfer. Si deep RIE etch process was optimized by applying dual passivation technique which enabled to realize sub-micron gap pillar-type filter structures and large reaction chambers simultaneously using single-mask process. Wide range of filtration gap sizes demonstrated in this work offer versatile applications for fine cell trapping such as protozoa and bacteria. Fluid injection channels for the device were realized through wafer backside Si wet etch processing to complete the filter device chip fabrication.

Original languageEnglish (US)
Title of host publicationMicromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
DOIs
StatePublished - 2007
Externally publishedYes
EventMicromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII - San Jose, CA, United States
Duration: Jan 22 2007Jan 24 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6462
ISSN (Print)0277-786X

Other

OtherMicromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII
Country/TerritoryUnited States
CitySan Jose, CA
Period1/22/071/24/07

Keywords

  • Biological devices
  • Cell trapping
  • Filter chips
  • Gap fill
  • Microfluidic devices
  • Pathogens
  • Si deep RIE
  • Si micro-fabrication
  • Si microstructures

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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