Abstract
The varied processing technologies that have been employed to fabricate air-post, implanted, buried heterostructure, and selectively oxidized vertical cavity surface emitting lasers (VCSELs) are discussed. The impact of the fabrication technologies on VCSEL performance are also discussed.
| Original language | English (US) |
|---|---|
| Number of pages | 1 |
| Journal | Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS |
| Volume | 11 |
| State | Published - 1997 |
| Externally published | Yes |
| Event | Proceedings of the 1997 Conference on Lasers and Electro-Optics, CLEO - Baltimore, MD, USA Duration: May 18 1997 → May 23 1997 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering