Fabrication technologies for vertical cavity lasers

Research output: Contribution to journalConference articlepeer-review


The varied processing technologies that have been employed to fabricate air-post, implanted, buried heterostructure, and selectively oxidized vertical cavity surface emitting lasers (VCSELs) are discussed. The impact of the fabrication technologies on VCSEL performance are also discussed.

Original languageEnglish (US)
Number of pages1
JournalConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
StatePublished - 1997
Externally publishedYes
EventProceedings of the 1997 Conference on Lasers and Electro-Optics, CLEO - Baltimore, MD, USA
Duration: May 18 1997May 23 1997

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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