Fabrication techniques for high-performance Si heterojunction (SHJ) microcells

Megan E. Phelan, Maggie M. Potter, Pradeep Balaji, Phil R. Jahelka, Haley C. Bauser, Rebecca Glaudell, David R. Needell, Michael Enright, Andre Augusto, Ralph Nuzzo, Harry A. Atwater

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Silicon heterojunction (SHJ) microcells offer a promising photovoltaic (PV) device for a wide range of micro-electronic applications due to their high performance potential. We examine two separate techniques for dicing SHJ microcells from bulk wafers: deep reactive ion etching (DRIE) and micro-laser cutting. We present the challenges and optimizations for each technique, as well as microcell performance for a 400μm x 400μm x 80μm microcell. Given the thickness of silicon wafers and the low face-to-edge area ratio for SHJ microcells of these dimensions, we consider varied illumination conditions for this structure. SHJ microcells are able to absorb photons along all surfaces; as such, we study microcell performance at each edge interface. We examine both modeled and experimental data of microcells across various lighting conditions and present high-performances for both sets of measurements.

Original languageEnglish (US)
Title of host publication2021 IEEE 48th Photovoltaic Specialists Conference, PVSC 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
Number of pages5
ISBN (Electronic)9781665419222
StatePublished - Jun 20 2021
Event48th IEEE Photovoltaic Specialists Conference, PVSC 2021 - Fort Lauderdale, United States
Duration: Jun 20 2021Jun 25 2021

Publication series

NameConference Record of the IEEE Photovoltaic Specialists Conference
ISSN (Print)0160-8371


Conference48th IEEE Photovoltaic Specialists Conference, PVSC 2021
Country/TerritoryUnited States
CityFort Lauderdale


  • microcell
  • photovoltaic
  • silicon heterojunction

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering


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