Fabrication techniques for high-performance Si heterojunction (SHJ) microcells

Megan E. Phelan; Maggie M. Potter; Pradeep Balaji; Phil R. Jahelka; Haley C. Bauser; Rebecca Glaudell; David R. Needell; Michael Enright; Andre Augusto; Ralph Nuzzo; Harry A. Atwater

doi:10.1109/PVSC43889.2021.9518579

Fabrication techniques for high-performance Si heterojunction (SHJ) microcells

Megan E. Phelan, Maggie M. Potter, Pradeep Balaji, Phil R. Jahelka, Haley C. Bauser, Rebecca Glaudell, David R. Needell, Michael Enright, Andre Augusto, Ralph Nuzzo, Harry A. Atwater

Chemistry

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Silicon heterojunction (SHJ) microcells offer a promising photovoltaic (PV) device for a wide range of micro-electronic applications due to their high performance potential. We examine two separate techniques for dicing SHJ microcells from bulk wafers: deep reactive ion etching (DRIE) and micro-laser cutting. We present the challenges and optimizations for each technique, as well as microcell performance for a 400μm x 400μm x 80μm microcell. Given the thickness of silicon wafers and the low face-to-edge area ratio for SHJ microcells of these dimensions, we consider varied illumination conditions for this structure. SHJ microcells are able to absorb photons along all surfaces; as such, we study microcell performance at each edge interface. We examine both modeled and experimental data of microcells across various lighting conditions and present high-performances for both sets of measurements.

Original language	English (US)
Title of host publication	2021 IEEE 48th Photovoltaic Specialists Conference, PVSC 2021
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	330-334
Number of pages	5
ISBN (Electronic)	9781665419222
DOIs	https://doi.org/10.1109/PVSC43889.2021.9518579
State	Published - Jun 20 2021
Event	48th IEEE Photovoltaic Specialists Conference, PVSC 2021 - Fort Lauderdale, United States Duration: Jun 20 2021 → Jun 25 2021

Publication series

Name	Conference Record of the IEEE Photovoltaic Specialists Conference
ISSN (Print)	0160-8371

Conference

Conference	48th IEEE Photovoltaic Specialists Conference, PVSC 2021
Country/Territory	United States
City	Fort Lauderdale
Period	6/20/21 → 6/25/21

Keywords

microcell
photovoltaic
silicon heterojunction

ASJC Scopus subject areas

Control and Systems Engineering
Industrial and Manufacturing Engineering
Electrical and Electronic Engineering

Online availability

10.1109/PVSC43889.2021.9518579

Library availability

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Cite this

Phelan, M. E., Potter, M. M., Balaji, P., Jahelka, P. R., Bauser, H. C., Glaudell, R., Needell, D. R., Enright, M., Augusto, A., Nuzzo, R., & Atwater, H. A. (2021). Fabrication techniques for high-performance Si heterojunction (SHJ) microcells. In 2021 IEEE 48th Photovoltaic Specialists Conference, PVSC 2021 (pp. 330-334). (Conference Record of the IEEE Photovoltaic Specialists Conference). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/PVSC43889.2021.9518579

Fabrication techniques for high-performance Si heterojunction (SHJ) microcells. / Phelan, Megan E.; Potter, Maggie M.; Balaji, Pradeep et al.

2021 IEEE 48th Photovoltaic Specialists Conference, PVSC 2021. Institute of Electrical and Electronics Engineers Inc., 2021. p. 330-334 (Conference Record of the IEEE Photovoltaic Specialists Conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Phelan, ME, Potter, MM, Balaji, P, Jahelka, PR, Bauser, HC, Glaudell, R, Needell, DR, Enright, M, Augusto, A, Nuzzo, R & Atwater, HA 2021, Fabrication techniques for high-performance Si heterojunction (SHJ) microcells. in 2021 IEEE 48th Photovoltaic Specialists Conference, PVSC 2021. Conference Record of the IEEE Photovoltaic Specialists Conference, Institute of Electrical and Electronics Engineers Inc., pp. 330-334, 48th IEEE Photovoltaic Specialists Conference, PVSC 2021, Fort Lauderdale, United States, 6/20/21. https://doi.org/10.1109/PVSC43889.2021.9518579

Phelan ME, Potter MM, Balaji P, Jahelka PR, Bauser HC, Glaudell R et al. Fabrication techniques for high-performance Si heterojunction (SHJ) microcells. In 2021 IEEE 48th Photovoltaic Specialists Conference, PVSC 2021. Institute of Electrical and Electronics Engineers Inc. 2021. p. 330-334. (Conference Record of the IEEE Photovoltaic Specialists Conference). doi: 10.1109/PVSC43889.2021.9518579

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abstract = "Silicon heterojunction (SHJ) microcells offer a promising photovoltaic (PV) device for a wide range of micro-electronic applications due to their high performance potential. We examine two separate techniques for dicing SHJ microcells from bulk wafers: deep reactive ion etching (DRIE) and micro-laser cutting. We present the challenges and optimizations for each technique, as well as microcell performance for a 400μm x 400μm x 80μm microcell. Given the thickness of silicon wafers and the low face-to-edge area ratio for SHJ microcells of these dimensions, we consider varied illumination conditions for this structure. SHJ microcells are able to absorb photons along all surfaces; as such, we study microcell performance at each edge interface. We examine both modeled and experimental data of microcells across various lighting conditions and present high-performances for both sets of measurements.",

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AU - Balaji, Pradeep

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AU - Bauser, Haley C.

AU - Glaudell, Rebecca

AU - Needell, David R.

AU - Enright, Michael

AU - Augusto, Andre

AU - Nuzzo, Ralph

AU - Atwater, Harry A.

N1 - Funding Information: This work was carried out with support from the “Photonics at Thermodynamic Limits” Energy Frontier Research Center funded by the U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences under Award Number DE-SC0019140.Sciences Award Number DE-SC0019140. Publisher Copyright: © 2021 IEEE.

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Y1 - 2021/6/20

N2 - Silicon heterojunction (SHJ) microcells offer a promising photovoltaic (PV) device for a wide range of micro-electronic applications due to their high performance potential. We examine two separate techniques for dicing SHJ microcells from bulk wafers: deep reactive ion etching (DRIE) and micro-laser cutting. We present the challenges and optimizations for each technique, as well as microcell performance for a 400μm x 400μm x 80μm microcell. Given the thickness of silicon wafers and the low face-to-edge area ratio for SHJ microcells of these dimensions, we consider varied illumination conditions for this structure. SHJ microcells are able to absorb photons along all surfaces; as such, we study microcell performance at each edge interface. We examine both modeled and experimental data of microcells across various lighting conditions and present high-performances for both sets of measurements.

AB - Silicon heterojunction (SHJ) microcells offer a promising photovoltaic (PV) device for a wide range of micro-electronic applications due to their high performance potential. We examine two separate techniques for dicing SHJ microcells from bulk wafers: deep reactive ion etching (DRIE) and micro-laser cutting. We present the challenges and optimizations for each technique, as well as microcell performance for a 400μm x 400μm x 80μm microcell. Given the thickness of silicon wafers and the low face-to-edge area ratio for SHJ microcells of these dimensions, we consider varied illumination conditions for this structure. SHJ microcells are able to absorb photons along all surfaces; as such, we study microcell performance at each edge interface. We examine both modeled and experimental data of microcells across various lighting conditions and present high-performances for both sets of measurements.

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Fabrication techniques for high-performance Si heterojunction (SHJ) microcells

Abstract

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Conference

Keywords

ASJC Scopus subject areas

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