@inproceedings{9af7293a5a22481eab448907907b8037,
title = "Fabrication techniques for high-performance Si heterojunction (SHJ) microcells",
abstract = "Silicon heterojunction (SHJ) microcells offer a promising photovoltaic (PV) device for a wide range of micro-electronic applications due to their high performance potential. We examine two separate techniques for dicing SHJ microcells from bulk wafers: deep reactive ion etching (DRIE) and micro-laser cutting. We present the challenges and optimizations for each technique, as well as microcell performance for a 400μm x 400μm x 80μm microcell. Given the thickness of silicon wafers and the low face-to-edge area ratio for SHJ microcells of these dimensions, we consider varied illumination conditions for this structure. SHJ microcells are able to absorb photons along all surfaces; as such, we study microcell performance at each edge interface. We examine both modeled and experimental data of microcells across various lighting conditions and present high-performances for both sets of measurements.",
keywords = "microcell, photovoltaic, silicon heterojunction",
author = "Phelan, {Megan E.} and Potter, {Maggie M.} and Pradeep Balaji and Jahelka, {Phil R.} and Bauser, {Haley C.} and Rebecca Glaudell and Needell, {David R.} and Michael Enright and Andre Augusto and Ralph Nuzzo and Atwater, {Harry A.}",
note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 48th IEEE Photovoltaic Specialists Conference, PVSC 2021 ; Conference date: 20-06-2021 Through 25-06-2021",
year = "2021",
month = jun,
day = "20",
doi = "10.1109/PVSC43889.2021.9518579",
language = "English (US)",
series = "Conference Record of the IEEE Photovoltaic Specialists Conference",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "330--334",
booktitle = "2021 IEEE 48th Photovoltaic Specialists Conference, PVSC 2021",
address = "United States",
}