@inproceedings{9af7293a5a22481eab448907907b8037,
title = "Fabrication techniques for high-performance Si heterojunction (SHJ) microcells",
abstract = "Silicon heterojunction (SHJ) microcells offer a promising photovoltaic (PV) device for a wide range of micro-electronic applications due to their high performance potential. We examine two separate techniques for dicing SHJ microcells from bulk wafers: deep reactive ion etching (DRIE) and micro-laser cutting. We present the challenges and optimizations for each technique, as well as microcell performance for a 400μm x 400μm x 80μm microcell. Given the thickness of silicon wafers and the low face-to-edge area ratio for SHJ microcells of these dimensions, we consider varied illumination conditions for this structure. SHJ microcells are able to absorb photons along all surfaces; as such, we study microcell performance at each edge interface. We examine both modeled and experimental data of microcells across various lighting conditions and present high-performances for both sets of measurements.",
keywords = "microcell, photovoltaic, silicon heterojunction",
author = "Phelan, {Megan E.} and Potter, {Maggie M.} and Pradeep Balaji and Jahelka, {Phil R.} and Bauser, {Haley C.} and Rebecca Glaudell and Needell, {David R.} and Michael Enright and Andre Augusto and Ralph Nuzzo and Atwater, {Harry A.}",
note = "Funding Information: This work was carried out with support from the “Photonics at Thermodynamic Limits” Energy Frontier Research Center funded by the U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences under Award Number DE-SC0019140.Sciences Award Number DE-SC0019140. Publisher Copyright: {\textcopyright} 2021 IEEE.; 48th IEEE Photovoltaic Specialists Conference, PVSC 2021 ; Conference date: 20-06-2021 Through 25-06-2021",
year = "2021",
month = jun,
day = "20",
doi = "10.1109/PVSC43889.2021.9518579",
language = "English (US)",
series = "Conference Record of the IEEE Photovoltaic Specialists Conference",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "330--334",
booktitle = "2021 IEEE 48th Photovoltaic Specialists Conference, PVSC 2021",
address = "United States",
}