Fabrication of ultra-thin strained silicon on insulator

Keyphrases

• Ultrathin 100%
• Strained Silicon-on-insulator (sSOI) 100%
• MOSFET 50%
• Epitaxial Layers 50%
• As-grown 50%
• SiGe 50%
• Surface Roughness 50%
• Insulator 50%
• Thickness Uniformity 50%
• Double Gate 50%
• Raman Analysis 50%
• Etch Back 50%
• Strained Silicon 50%
• Thin Silicon Layer 50%
• Insulator Substrate 50%
• Wafer Thickness 50%
• Etch-stop 50%
• Ultra-thin Body 50%
• Strained Si 50%
• Strained Silicon Layers 50%

Engineering

• Silicon on Insulator 100%
• Silicon Layer 100%
• Metal-Oxide-Semiconductor Field-Effect Transistor 50%
• Epitaxial Film 50%