The use of focused-ion beam (FIB) milling for rapid direct-writing of uniform cylindrical pores in poly(methylmethacrylate) (PMMA) was analyzed. The PMMA films were spincasted on sacrificial Si carriers before the FIB milling process. The submicrometer pores were characterized by electron microscopy and confocal fluorescence sectioning. The results show the fabrication of small arrays of channels with a defined number and arbitrary in-plane spatial arrangement.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)