Fabrication of single nanofluidic channels in poly(methylmethacrylate) films via focused-ion beam milling for use as molecular gates

Donald M. Cannon; Bruce R. Flachsbart; Mark A. Shannon; Jonathan V. Sweedler; Paul W. Bohn

doi:10.1063/1.1780605

Fabrication of single nanofluidic channels in poly(methylmethacrylate) films via focused-ion beam milling for use as molecular gates

Donald M. Cannon, Bruce R. Flachsbart, Mark A. Shannon, Jonathan V. Sweedler, Paul W. Bohn

Research output: Contribution to journal › Article › peer-review

Abstract

The use of focused-ion beam (FIB) milling for rapid direct-writing of uniform cylindrical pores in poly(methylmethacrylate) (PMMA) was analyzed. The PMMA films were spincasted on sacrificial Si carriers before the FIB milling process. The submicrometer pores were characterized by electron microscopy and confocal fluorescence sectioning. The results show the fabrication of small arrays of channels with a defined number and arbitrary in-plane spatial arrangement.

Original language	English (US)
Pages (from-to)	1241-1243
Number of pages	3
Journal	Applied Physics Letters
Volume	85
Issue number	7
DOIs	https://doi.org/10.1063/1.1780605
State	Published - Aug 16 2004

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.1780605

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Fabrication of single nanofluidic channels in poly(methylmethacrylate) films via focused-ion beam milling for use as molecular gates. / Cannon, Donald M.; Flachsbart, Bruce R.; Shannon, Mark A.; Sweedler, Jonathan V.; Bohn, Paul W.

In: Applied Physics Letters, Vol. 85, No. 7, 16.08.2004, p. 1241-1243.

Research output: Contribution to journal › Article › peer-review

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