Fabrication of single nanofluidic channels in poly(methylmethacrylate) films via focused-ion beam milling for use as molecular gates

Donald M. Cannon, Bruce R. Flachsbart, Mark A. Shannon, Jonathan V. Sweedler, Paul W. Bohn

Research output: Contribution to journalArticlepeer-review

Abstract

The use of focused-ion beam (FIB) milling for rapid direct-writing of uniform cylindrical pores in poly(methylmethacrylate) (PMMA) was analyzed. The PMMA films were spincasted on sacrificial Si carriers before the FIB milling process. The submicrometer pores were characterized by electron microscopy and confocal fluorescence sectioning. The results show the fabrication of small arrays of channels with a defined number and arbitrary in-plane spatial arrangement.

Original languageEnglish (US)
Pages (from-to)1241-1243
Number of pages3
JournalApplied Physics Letters
Volume85
Issue number7
DOIs
StatePublished - Aug 16 2004

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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