Fabrication of silicon nanoplate and nanowire biosensor arrays with high specificity and sub-picomolar limits of detection

Diagnostic platforms based upon microfluidics coupled to ion-selective field effect transistors (ISFET's) offer great potential to address some world health goals since they can be made portable, low-cost, miniaturized, and sensitive. We have fabricated arrays of accumulation mode, fully depleted silicon nanowires (50 nm width) and nanoplates (2um width) of 30nm thickness on SOI substrates, all of which are individually addressable. The devices respond to changes in charge density well and have excellent time stability in fluid. By coupling probe proteins to the ISFET surface, we are able to detect analytes down to pg/mL levels.