Fabrication of silicon nanoplate and nanowire biosensor arrays with high specificity and sub-picomolar limits of detection

B. Dorvel, B. Reddy, D. Bergstrom, M. A. Alam, S. Clare, R. Bashir

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Diagnostic platforms based upon microfluidics coupled to ion-selective field effect transistors (ISFET's) offer great potential to address some world health goals since they can be made portable, low-cost, miniaturized, and sensitive. We have fabricated arrays of accumulation mode, fully depleted silicon nanowires (50 nm width) and nanoplates (2um width) of 30nm thickness on SOI substrates, all of which are individually addressable. The devices respond to changes in charge density well and have excellent time stability in fluid. By coupling probe proteins to the ISFET surface, we are able to detect analytes down to pg/mL levels.

Original languageEnglish (US)
Title of host publication14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
Pages1871-1873
Number of pages3
StatePublished - Dec 1 2010
Event14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 - Groningen, Netherlands
Duration: Oct 3 2010Oct 7 2010

Publication series

Name14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
Volume3

Other

Other14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010
CountryNetherlands
CityGroningen
Period10/3/1010/7/10

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Keywords

  • Biointerfacing
  • Biosensor
  • Monolayer
  • Nanowire

ASJC Scopus subject areas

  • Control and Systems Engineering

Cite this

Dorvel, B., Reddy, B., Bergstrom, D., Alam, M. A., Clare, S., & Bashir, R. (2010). Fabrication of silicon nanoplate and nanowire biosensor arrays with high specificity and sub-picomolar limits of detection. In 14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010 (pp. 1871-1873). (14th International Conference on Miniaturized Systems for Chemistry and Life Sciences 2010, MicroTAS 2010; Vol. 3).