Fabrication of silicon MOSFETs using soft lithography

Noo Li Jeon, Junmin Hu, George M. Whitesides, Martin K. Erhardt, Ralph G Nuzzo

Research output: Contribution to journalArticle

Original languageEnglish (US)
Pages (from-to)1466-1469
Number of pages4
JournalAdvanced Materials
Volume10
Issue number17
DOIs
StatePublished - Jan 1 1998

ASJC Scopus subject areas

  • Materials Science(all)
  • Mechanics of Materials
  • Mechanical Engineering

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