TY - GEN
T1 - Fabrication of photonic crystal biosensors using micro-molding of nanoporous glass
AU - Block, Ian D.
AU - Chan, Leo L.
AU - Cunningham, Brian T.
PY - 2005
Y1 - 2005
N2 - We demonstrate a micro-molding method for submicron patterning of a low-index sol-gel nanoporous glass for the purpose of fabricating large-area (∼3''×5'') label-free photonic crystal optical biosensors. SEM images show that the sol-gel exhibited minimal shrinkage and good substrate adhesion and depict precise and uniform pattern transfer over the fabricated area within the limits of measurement resolution. A unique characterization approach accurately and quickly revealed porous glass patterned over a large area with geometrical and material properties uniform within 1%. We suggest that this robust method is an excellent approach for photonic crystal sensor fabrication, and may also find applications in integrated optics and electronics.
AB - We demonstrate a micro-molding method for submicron patterning of a low-index sol-gel nanoporous glass for the purpose of fabricating large-area (∼3''×5'') label-free photonic crystal optical biosensors. SEM images show that the sol-gel exhibited minimal shrinkage and good substrate adhesion and depict precise and uniform pattern transfer over the fabricated area within the limits of measurement resolution. A unique characterization approach accurately and quickly revealed porous glass patterned over a large area with geometrical and material properties uniform within 1%. We suggest that this robust method is an excellent approach for photonic crystal sensor fabrication, and may also find applications in integrated optics and electronics.
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U2 - 10.1557/proc-0900-o03-07
DO - 10.1557/proc-0900-o03-07
M3 - Conference contribution
AN - SCOPUS:34249951634
SN - 1558998543
SN - 9781558998544
T3 - Materials Research Society Symposium Proceedings
SP - 46
EP - 51
BT - Nanoparticles and Nanostructures in Sensors and Catalysis
PB - Materials Research Society
T2 - 2005 MRS Fall Meeting
Y2 - 28 November 2005 through 2 December 2005
ER -