Fabrication of perovskite-based Pb(Zn1/3Nb2/3)O3 (PZN) thin films using charged liquid cluster beam

Yi Yang, Kyekyoon Kim, Hyungsoo Choi

Research output: Contribution to journalArticlepeer-review


Charged nanodrops of precursor solutions are used to prepare very thin Pb(Zn1/3Nb2/3)O3 (PZN) films with full perovskite phase on Pt/Ti/SiO2/Si substrates. PbTiO3 (PT) and BaTiO3 (BT) are added to stabilize the formation of the perovskite structure. The effect of the various lead and zinc sources on the stabilization of the perovskite phase is investigated. When acetate group is used as a ligand for the lead and zinc sources, the perovskite phase can be stabilized in (1-x)PZN-xPT films at x = 0.7. However, with 2-ethylhexanote ligand the minimum PT content required to stabilize the perovskite phase in (1-x)PZN-xPT films is reduced to x = 0.6. With a 5% BT addition in the 2-ethylhexanote precursor, the minimum PT content required to stabilize the perovskite phase is further reduced to approximately x = 0.4 even in a film as thin as 3 μm in thickness.

Original languageEnglish (US)
Pages (from-to)97-102
Number of pages6
JournalThin Solid Films
Issue number1-2
StatePublished - Sep 21 2001


  • BaTiO (BT)
  • Pb(ZnNb)O (PZN) films
  • PbTiO (PT)
  • Thin films

ASJC Scopus subject areas

  • Surfaces, Coatings and Films
  • Condensed Matter Physics
  • Surfaces and Interfaces

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