The fabrication of microstructures and components for microelectromechanical systems (MEMS), made of an oxidation-stable ceramic, are described using soft lithographic techniques. A polymeric precursor is molded into the required form and pyrolyzed to form the ceramic structures. The soft lithographic techniques are used to generate complex ceramic features without resorting to etching procedures.
|Original language||English (US)|
|Number of pages||5|
|State||Published - Jan 5 2001|
ASJC Scopus subject areas
- Materials Science(all)
- Mechanics of Materials
- Mechanical Engineering