TY - JOUR
T1 - Fabrication of high performance ceramic microstructures from a polymeric precursor using soft lithography
AU - Yang, Hong
AU - Deschatelets, Pascal
AU - Brittain, Scott T.
AU - Whitesides, George M.
PY - 2001/1/5
Y1 - 2001/1/5
N2 - The fabrication of microstructures and components for microelectromechanical systems (MEMS), made of an oxidation-stable ceramic, are described using soft lithographic techniques. A polymeric precursor is molded into the required form and pyrolyzed to form the ceramic structures. The soft lithographic techniques are used to generate complex ceramic features without resorting to etching procedures.
AB - The fabrication of microstructures and components for microelectromechanical systems (MEMS), made of an oxidation-stable ceramic, are described using soft lithographic techniques. A polymeric precursor is molded into the required form and pyrolyzed to form the ceramic structures. The soft lithographic techniques are used to generate complex ceramic features without resorting to etching procedures.
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U2 - 10.1002/1521-4095(200101)13:1<54::AID-ADMA54>3.0.CO;2-Y
DO - 10.1002/1521-4095(200101)13:1<54::AID-ADMA54>3.0.CO;2-Y
M3 - Article
AN - SCOPUS:0035131680
SN - 0935-9648
VL - 13
SP - 54
EP - 58
JO - Advanced Materials
JF - Advanced Materials
IS - 1
ER -