Fabrication of high performance ceramic microstructures from a polymeric precursor using soft lithography

Hong Yang; Pascal Deschatelets; Scott T. Brittain; George M. Whitesides

doi:10.1002/1521-4095(200101)13:1<54::AID-ADMA54>3.0.CO;2-Y

Fabrication of high performance ceramic microstructures from a polymeric precursor using soft lithography

Hong Yang, Pascal Deschatelets, Scott T. Brittain, George M. Whitesides

Research output: Contribution to journal › Article › peer-review

Abstract

The fabrication of microstructures and components for microelectromechanical systems (MEMS), made of an oxidation-stable ceramic, are described using soft lithographic techniques. A polymeric precursor is molded into the required form and pyrolyzed to form the ceramic structures. The soft lithographic techniques are used to generate complex ceramic features without resorting to etching procedures.

Original language	English (US)
Pages (from-to)	54-58
Number of pages	5
Journal	Advanced Materials
Volume	13
Issue number	1
DOIs	https://doi.org/10.1002/1521-4095(200101)13:1<54::AID-ADMA54>3.0.CO;2-Y
State	Published - Jan 5 2001
Externally published	Yes

ASJC Scopus subject areas

General Materials Science
Mechanics of Materials
Mechanical Engineering

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10.1002/1521-4095(200101)13:1<54::AID-ADMA54>3.0.CO;2-Y

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AB - The fabrication of microstructures and components for microelectromechanical systems (MEMS), made of an oxidation-stable ceramic, are described using soft lithographic techniques. A polymeric precursor is molded into the required form and pyrolyzed to form the ceramic structures. The soft lithographic techniques are used to generate complex ceramic features without resorting to etching procedures.

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Fabrication of high performance ceramic microstructures from a polymeric precursor using soft lithography

Abstract

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