@inproceedings{d3a9cee007164d2ab0ae0e1429f69fe2,
title = "Fabrication of gray-scale semiconductor structures with dynamic digital projection photochemical etching",
abstract = "Digital projection photochemical etching is a novel single-step process for fabricating customized gray-scale semiconductor structures. Several features including a variable height pyramid array are fabricated, demonstrating the resolution, range, accuracy, and dynamics of the technique.",
keywords = "Arrays, Etching, Fabrication, Gallium arsenide, Gray-scale, Surface topography",
author = "Kaiyuan Wang and Chris Edwards and Srivastava, {Shailendra N.} and Goddard, {Lynford L.}",
note = "Publisher Copyright: {\textcopyright} 2015 OSA.; Conference on Lasers and Electro-Optics, CLEO 2015 ; Conference date: 10-05-2015 Through 15-05-2015",
year = "2015",
month = aug,
day = "10",
language = "English (US)",
series = "Conference on Lasers and Electro-Optics Europe - Technical Digest",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2015 Conference on Lasers and Electro-Optics, CLEO 2015",
address = "United States",
}