TY - GEN
T1 - Fabrication of gray-scale semiconductor structures with dynamic digital projection photochemical etching
AU - Wang, Kaiyuan
AU - Edwards, Chris
AU - Srivastava, Shailendra N.
AU - Goddard, Lynford L.
PY - 2015/5/4
Y1 - 2015/5/4
N2 - Digital projection photochemical etching is a novel single-step process for fabricating customized gray-scale semiconductor structures. Several features including a variable height pyramid array are fabricated, demonstrating the resolution, range, accuracy, and dynamics of the technique.
AB - Digital projection photochemical etching is a novel single-step process for fabricating customized gray-scale semiconductor structures. Several features including a variable height pyramid array are fabricated, demonstrating the resolution, range, accuracy, and dynamics of the technique.
UR - http://www.scopus.com/inward/record.url?scp=84935469753&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84935469753&partnerID=8YFLogxK
U2 - 10.1364/CLEO_SI.2015.STh3G.2
DO - 10.1364/CLEO_SI.2015.STh3G.2
M3 - Conference contribution
AN - SCOPUS:84935469753
T3 - CLEO: Science and Innovations, CLEO-SI 2015
SP - 2267
BT - CLEO
PB - Optical Society of America (OSA)
T2 - CLEO: Science and Innovations, CLEO-SI 2015
Y2 - 10 May 2015 through 15 May 2015
ER -