Fabrication of freestanding 1-D PDMS microstructures using capillary micromolding

Jagannathan Rajagopalan, M Taher A Saif

Research output: Contribution to journalArticle

Abstract

A method to create freestanding, biocompatible polydimethylsiloxane (PDMS) microstructures is presented. First, capillary flow through micro channels on silicon (Si) substrates is used to create high fidelity PDMS structures that are a few μm wide and deep but several mm long (length to width/depth ~ 500:1. Next, an improvised procedure is employed to remove the cured PDMS microstructures from the Si substrate without damaging them. The method is used to create extremely sensitive cantilever beams with stiffness less than 0.1 pN/μm, and micro platforms for cell biology studies. The PDMS microstructures created using this method have applications in cell mechanobiology as force and mass sensors.

Original languageEnglish (US)
Article number6541951
Pages (from-to)992-994
Number of pages3
JournalJournal of Microelectromechanical Systems
Volume22
Issue number5
DOIs
StatePublished - Jun 25 2013

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Polydimethylsiloxane
Fabrication
Microstructure
Cytology
Capillary flow
Silicon
Cantilever beams
Substrates
Stiffness
Sensors

Keywords

  • BioMEMS
  • Cell mechanics
  • Force sensors

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Fabrication of freestanding 1-D PDMS microstructures using capillary micromolding. / Rajagopalan, Jagannathan; Saif, M Taher A.

In: Journal of Microelectromechanical Systems, Vol. 22, No. 5, 6541951, 25.06.2013, p. 992-994.

Research output: Contribution to journalArticle

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