Fabrication of diffractive optical elements with digital projection photochemical etching

Chris Edwards, Kaiyuan Wang, Benjamin G. Griffin, Renjie Zhou, Basanta Bhaduri, Gabriel Popescu, Lynford L Goddard

Research output: Contribution to conferencePaper

Abstract

We demonstrate a new fabrication technique called digital projection photochemical etching and apply it to make complicated gray-scale diffractive optical elements, such as a radial sinusoidal grating, in a single processing step.

Original languageEnglish (US)
StatePublished - Jan 1 2014
Event2014 Conference on Lasers and Electro-Optics, CLEO 2014 - San Jose, United States
Duration: Jun 8 2014Jun 13 2014

Other

Other2014 Conference on Lasers and Electro-Optics, CLEO 2014
CountryUnited States
CitySan Jose
Period6/8/146/13/14

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Edwards, C., Wang, K., Griffin, B. G., Zhou, R., Bhaduri, B., Popescu, G., & Goddard, L. L. (2014). Fabrication of diffractive optical elements with digital projection photochemical etching. Paper presented at 2014 Conference on Lasers and Electro-Optics, CLEO 2014, San Jose, United States.