Fabrication of diffractive optical elements with digital projection photochemical etching

Chris Edwards, Kaiyuan Wang, Benjamin G. Griffin, Renjie Zhou, Basanta Bhaduri, Gabriel Popescu, Lynford L Goddard

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We demonstrate a new fabrication technique called digital projection photochemical etching and apply it to make complicated gray-scale diffractive optical elements, such as a radial sinusoidal grating, in a single processing step.

Original languageEnglish (US)
Title of host publication2014 Conference on Lasers and Electro-Optics, CLEO 2014
PublisherInstitute of Electrical and Electronics Engineers Inc.
Volume2014-January
StatePublished - Jan 1 2014
Event2014 Conference on Lasers and Electro-Optics, CLEO 2014 - San Jose, United States
Duration: Jun 8 2014Jun 13 2014

Other

Other2014 Conference on Lasers and Electro-Optics, CLEO 2014
CountryUnited States
CitySan Jose
Period6/8/146/13/14

Fingerprint

digital techniques
Diffractive optical elements
gray scale
Diffraction gratings
Etching
projection
etching
gratings
Fabrication
fabrication
Processing

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials

Cite this

Edwards, C., Wang, K., Griffin, B. G., Zhou, R., Bhaduri, B., Popescu, G., & Goddard, L. L. (2014). Fabrication of diffractive optical elements with digital projection photochemical etching. In 2014 Conference on Lasers and Electro-Optics, CLEO 2014 (Vol. 2014-January). [6989439] Institute of Electrical and Electronics Engineers Inc..

Fabrication of diffractive optical elements with digital projection photochemical etching. / Edwards, Chris; Wang, Kaiyuan; Griffin, Benjamin G.; Zhou, Renjie; Bhaduri, Basanta; Popescu, Gabriel; Goddard, Lynford L.

2014 Conference on Lasers and Electro-Optics, CLEO 2014. Vol. 2014-January Institute of Electrical and Electronics Engineers Inc., 2014. 6989439.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Edwards, C, Wang, K, Griffin, BG, Zhou, R, Bhaduri, B, Popescu, G & Goddard, LL 2014, Fabrication of diffractive optical elements with digital projection photochemical etching. in 2014 Conference on Lasers and Electro-Optics, CLEO 2014. vol. 2014-January, 6989439, Institute of Electrical and Electronics Engineers Inc., 2014 Conference on Lasers and Electro-Optics, CLEO 2014, San Jose, United States, 6/8/14.
Edwards C, Wang K, Griffin BG, Zhou R, Bhaduri B, Popescu G et al. Fabrication of diffractive optical elements with digital projection photochemical etching. In 2014 Conference on Lasers and Electro-Optics, CLEO 2014. Vol. 2014-January. Institute of Electrical and Electronics Engineers Inc. 2014. 6989439
Edwards, Chris ; Wang, Kaiyuan ; Griffin, Benjamin G. ; Zhou, Renjie ; Bhaduri, Basanta ; Popescu, Gabriel ; Goddard, Lynford L. / Fabrication of diffractive optical elements with digital projection photochemical etching. 2014 Conference on Lasers and Electro-Optics, CLEO 2014. Vol. 2014-January Institute of Electrical and Electronics Engineers Inc., 2014.
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