Fabrication of diffractive optical elements with digital projection photochemical etching

Chris Edwards, Kaiyuan Wang, Benjamin G. Griffin, Renjie Zhou, Basanta Bhaduri, Gabriel Popescu, Lynford L. Goddard

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We demonstrate a new fabrication technique called digital projection photochemical etching and apply it to make complicated gray-scale diffractive optical elements, such as a radial sinusoidal grating, in a single processing step. CLEO:2014

Original languageEnglish (US)
Title of host publicationCLEO
Subtitle of host publicationScience and Innovations, CLEO_SI 2014
PublisherOptical Society of American (OSA)
ISBN (Print)9781557529992
StatePublished - Jan 1 2014
EventCLEO: Science and Innovations, CLEO_SI 2014 - San Jose, CA, United States
Duration: Jun 8 2014Jun 13 2014

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Other

OtherCLEO: Science and Innovations, CLEO_SI 2014
CountryUnited States
CitySan Jose, CA
Period6/8/146/13/14

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ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Cite this

Edwards, C., Wang, K., Griffin, B. G., Zhou, R., Bhaduri, B., Popescu, G., & Goddard, L. L. (2014). Fabrication of diffractive optical elements with digital projection photochemical etching. In CLEO: Science and Innovations, CLEO_SI 2014 (Optics InfoBase Conference Papers). Optical Society of American (OSA).