Fabrication of diffractive optical elements with digital projection photochemical etching

Chris Edwards, Kaiyuan Wang, Benjamin G. Griffin, Renjie Zhou, Basanta Bhaduri, Gabriel Popescu, Lynford L Goddard

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We demonstrate a new fabrication technique called digital projection photochemical etching and apply it to make complicated gray-scale diffractive optical elements, such as a radial sinusoidal grating, in a single processing step. CLEO:2014

Original languageEnglish (US)
Title of host publicationCLEO
Subtitle of host publicationScience and Innovations, CLEO_SI 2014
PublisherOptical Society of American (OSA)
ISBN (Print)9781557529992
StatePublished - Jan 1 2014
EventCLEO: Science and Innovations, CLEO_SI 2014 - San Jose, CA, United States
Duration: Jun 8 2014Jun 13 2014

Other

OtherCLEO: Science and Innovations, CLEO_SI 2014
CountryUnited States
CitySan Jose, CA
Period6/8/146/13/14

Fingerprint

digital techniques
Diffractive optical elements
gray scale
Diffraction gratings
Etching
projection
etching
gratings
Fabrication
fabrication
Processing

ASJC Scopus subject areas

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Cite this

Edwards, C., Wang, K., Griffin, B. G., Zhou, R., Bhaduri, B., Popescu, G., & Goddard, L. L. (2014). Fabrication of diffractive optical elements with digital projection photochemical etching. In CLEO: Science and Innovations, CLEO_SI 2014 Optical Society of American (OSA).

Fabrication of diffractive optical elements with digital projection photochemical etching. / Edwards, Chris; Wang, Kaiyuan; Griffin, Benjamin G.; Zhou, Renjie; Bhaduri, Basanta; Popescu, Gabriel; Goddard, Lynford L.

CLEO: Science and Innovations, CLEO_SI 2014. Optical Society of American (OSA), 2014.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Edwards, C, Wang, K, Griffin, BG, Zhou, R, Bhaduri, B, Popescu, G & Goddard, LL 2014, Fabrication of diffractive optical elements with digital projection photochemical etching. in CLEO: Science and Innovations, CLEO_SI 2014. Optical Society of American (OSA), CLEO: Science and Innovations, CLEO_SI 2014, San Jose, CA, United States, 6/8/14.
Edwards C, Wang K, Griffin BG, Zhou R, Bhaduri B, Popescu G et al. Fabrication of diffractive optical elements with digital projection photochemical etching. In CLEO: Science and Innovations, CLEO_SI 2014. Optical Society of American (OSA). 2014
Edwards, Chris ; Wang, Kaiyuan ; Griffin, Benjamin G. ; Zhou, Renjie ; Bhaduri, Basanta ; Popescu, Gabriel ; Goddard, Lynford L. / Fabrication of diffractive optical elements with digital projection photochemical etching. CLEO: Science and Innovations, CLEO_SI 2014. Optical Society of American (OSA), 2014.
@inproceedings{c062cf10cc6f4c6b8c85a2cfc55b4026,
title = "Fabrication of diffractive optical elements with digital projection photochemical etching",
abstract = "We demonstrate a new fabrication technique called digital projection photochemical etching and apply it to make complicated gray-scale diffractive optical elements, such as a radial sinusoidal grating, in a single processing step. CLEO:2014",
author = "Chris Edwards and Kaiyuan Wang and Griffin, {Benjamin G.} and Renjie Zhou and Basanta Bhaduri and Gabriel Popescu and Goddard, {Lynford L}",
year = "2014",
month = "1",
day = "1",
language = "English (US)",
isbn = "9781557529992",
booktitle = "CLEO",
publisher = "Optical Society of American (OSA)",

}

TY - GEN

T1 - Fabrication of diffractive optical elements with digital projection photochemical etching

AU - Edwards, Chris

AU - Wang, Kaiyuan

AU - Griffin, Benjamin G.

AU - Zhou, Renjie

AU - Bhaduri, Basanta

AU - Popescu, Gabriel

AU - Goddard, Lynford L

PY - 2014/1/1

Y1 - 2014/1/1

N2 - We demonstrate a new fabrication technique called digital projection photochemical etching and apply it to make complicated gray-scale diffractive optical elements, such as a radial sinusoidal grating, in a single processing step. CLEO:2014

AB - We demonstrate a new fabrication technique called digital projection photochemical etching and apply it to make complicated gray-scale diffractive optical elements, such as a radial sinusoidal grating, in a single processing step. CLEO:2014

UR - http://www.scopus.com/inward/record.url?scp=84906875785&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84906875785&partnerID=8YFLogxK

M3 - Conference contribution

SN - 9781557529992

BT - CLEO

PB - Optical Society of American (OSA)

ER -