@inproceedings{0c4ec4f6b79b4cdcb26aaebcda207c9d,
title = "Fabrication of bio-inspired elastomer nanofiber arrays with spatulate tips using notching effect",
abstract = "In this paper, a fabrication method for nanoscale elastomer fiber arrays with spatulate tip endings as gecko foot-hairs inspired nanoscale fibrillar dry adhesives is proposed. A master mold is fabricated with silicon-on-insulator (SOI) wafer using the interference lithography and the notching effect during deep reactive ion etch process. Liquid polymer is poured over the mold in vacuum chamber and cured. Final nanoscale elastomer fiber arrays are released after etching the SOI master mold. Fabricated polyurethane nanofiber arrays with 410 nm fiber diameter and 2 μm height demonstrated macroscale adhesion pressures up to 14.1 N/cm2 on a 1 mm diameter silicon flat disk for a preload pressure of 6.7 N/cm2.",
keywords = "Biologically inspired adhesives, Fibrillar adhesion, Notching effect",
author = "Seok Kim and Metin Sitti and Jang, {Ji Hyun} and Thomas, {Edwin L.}",
year = "2008",
month = nov,
day = "10",
doi = "10.1109/NANO.2008.233",
language = "English (US)",
isbn = "9781424421046",
series = "2008 8th IEEE Conference on Nanotechnology, IEEE-NANO",
pages = "780--782",
booktitle = "2008 8th IEEE Conference on Nanotechnology, IEEE-NANO",
note = "2008 8th IEEE Conference on Nanotechnology, IEEE-NANO ; Conference date: 18-08-2008 Through 21-08-2008",
}