In this paper, a fabrication method for nanoscale elastomer fiber arrays with spatulate tip endings as gecko foot-hairs inspired nanoscale fibrillar dry adhesives is proposed. A master mold is fabricated with silicon-on-insulator (SOI) wafer using the interference lithography and the notching effect during deep reactive ion etch process. Liquid polymer is poured over the mold in vacuum chamber and cured. Final nanoscale elastomer fiber arrays are released after etching the SOI master mold. Fabricated polyurethane nanofiber arrays with 410 nm fiber diameter and 2 μm height demonstrated macroscale adhesion pressures up to 14.1 N/cm2 on a 1 mm diameter silicon flat disk for a preload pressure of 6.7 N/cm2.