Fabrication of Antenna-Coupled KID Array for Cosmic Microwave Background Detection

Q. Y. Tang, P. S. Barry, R. Basu Thakur, A. Kofman, A. Nadolski, J. Vieira, E. Shirokoff

Research output: Contribution to journalArticlepeer-review


Kinetic inductance detectors (KIDs) have become an attractive alternative to traditional bolometers in the sub-mm and mm observing community due to their innate frequency multiplexing capabilities and simple lithographic processes. These advantages make KIDs a viable option for the O(500,000) detectors needed for the upcoming Cosmic Microwave Background-Stage 4 experiment. We have fabricated an antenna-coupled MKID array in the 150 GHz band optimized for CMB detection. Our design uses a twin-slot antenna coupled to an inverted microstrip made from a superconducting Nb/Al bilayer as the strip, a Nb ground plane and a SiNx dielectric layer in between, which is then coupled to an Al KID grown on high-resistivity Si. We present the fabrication process and measurements of SiNx microstrip resonators.

Original languageEnglish (US)
Pages (from-to)149-156
Number of pages8
JournalJournal of Low Temperature Physics
Issue number3-4
StatePublished - Nov 1 2018


  • Fabrication
  • Kinetic inductance detector
  • Resonators
  • Sub-mm wavelength

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • General Materials Science
  • Condensed Matter Physics


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