Fabrication of Antenna-Coupled KID Array for Cosmic Microwave Background Detection

Q. Y. Tang; P. S. Barry; R. Basu Thakur; A. Kofman; A. Nadolski; J. Vieira; E. Shirokoff

doi:10.1007/s10909-018-1941-0

Fabrication of Antenna-Coupled KID Array for Cosmic Microwave Background Detection

Q. Y. Tang, P. S. Barry, R. Basu Thakur, A. Kofman, A. Nadolski, J. Vieira, E. Shirokoff

Research output: Contribution to journal › Article › peer-review

Abstract

Kinetic inductance detectors (KIDs) have become an attractive alternative to traditional bolometers in the sub-mm and mm observing community due to their innate frequency multiplexing capabilities and simple lithographic processes. These advantages make KIDs a viable option for the O(500,000) detectors needed for the upcoming Cosmic Microwave Background-Stage 4 experiment. We have fabricated an antenna-coupled MKID array in the 150 GHz band optimized for CMB detection. Our design uses a twin-slot antenna coupled to an inverted microstrip made from a superconducting Nb/Al bilayer as the strip, a Nb ground plane and a SiN_x dielectric layer in between, which is then coupled to an Al KID grown on high-resistivity Si. We present the fabrication process and measurements of SiN_x microstrip resonators.

Original language	English (US)
Pages (from-to)	149-156
Number of pages	8
Journal	Journal of Low Temperature Physics
Volume	193
Issue number	3-4
DOIs	https://doi.org/10.1007/s10909-018-1941-0
State	Published - Nov 1 2018

Keywords

Fabrication
Kinetic inductance detector
Resonators
Sub-mm wavelength

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
General Materials Science
Condensed Matter Physics

Online availability

10.1007/s10909-018-1941-0

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title = "Fabrication of Antenna-Coupled KID Array for Cosmic Microwave Background Detection",

abstract = "Kinetic inductance detectors (KIDs) have become an attractive alternative to traditional bolometers in the sub-mm and mm observing community due to their innate frequency multiplexing capabilities and simple lithographic processes. These advantages make KIDs a viable option for the O(500,000) detectors needed for the upcoming Cosmic Microwave Background-Stage 4 experiment. We have fabricated an antenna-coupled MKID array in the 150 GHz band optimized for CMB detection. Our design uses a twin-slot antenna coupled to an inverted microstrip made from a superconducting Nb/Al bilayer as the strip, a Nb ground plane and a SiNx dielectric layer in between, which is then coupled to an Al KID grown on high-resistivity Si. We present the fabrication process and measurements of SiNx microstrip resonators.",

keywords = "Fabrication, Kinetic inductance detector, Resonators, Sub-mm wavelength",

author = "Tang, {Q. Y.} and Barry, {P. S.} and {Basu Thakur}, R. and A. Kofman and A. Nadolski and J. Vieira and E. Shirokoff",

note = "Publisher Copyright: {\textcopyright} 2018, Springer Science+Business Media, LLC, part of Springer Nature.",

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doi = "10.1007/s10909-018-1941-0",

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AU - Tang, Q. Y.

AU - Barry, P. S.

AU - Basu Thakur, R.

AU - Kofman, A.

AU - Nadolski, A.

AU - Vieira, J.

AU - Shirokoff, E.

PY - 2018/11/1

Y1 - 2018/11/1

N2 - Kinetic inductance detectors (KIDs) have become an attractive alternative to traditional bolometers in the sub-mm and mm observing community due to their innate frequency multiplexing capabilities and simple lithographic processes. These advantages make KIDs a viable option for the O(500,000) detectors needed for the upcoming Cosmic Microwave Background-Stage 4 experiment. We have fabricated an antenna-coupled MKID array in the 150 GHz band optimized for CMB detection. Our design uses a twin-slot antenna coupled to an inverted microstrip made from a superconducting Nb/Al bilayer as the strip, a Nb ground plane and a SiNx dielectric layer in between, which is then coupled to an Al KID grown on high-resistivity Si. We present the fabrication process and measurements of SiNx microstrip resonators.

AB - Kinetic inductance detectors (KIDs) have become an attractive alternative to traditional bolometers in the sub-mm and mm observing community due to their innate frequency multiplexing capabilities and simple lithographic processes. These advantages make KIDs a viable option for the O(500,000) detectors needed for the upcoming Cosmic Microwave Background-Stage 4 experiment. We have fabricated an antenna-coupled MKID array in the 150 GHz band optimized for CMB detection. Our design uses a twin-slot antenna coupled to an inverted microstrip made from a superconducting Nb/Al bilayer as the strip, a Nb ground plane and a SiNx dielectric layer in between, which is then coupled to an Al KID grown on high-resistivity Si. We present the fabrication process and measurements of SiNx microstrip resonators.

KW - Fabrication

KW - Kinetic inductance detector

KW - Resonators

KW - Sub-mm wavelength

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JF - Journal of Low Temperature Physics

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ER -

Fabrication of Antenna-Coupled KID Array for Cosmic Microwave Background Detection

Abstract

Keywords

ASJC Scopus subject areas

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