Fabrication issues of oxide-confined VCSELs

Keyphrases

• Oxides 100%
• AlGaAs 100%
• Vertical-cavity Surface-emitting Laser (VCSEL) 100%
• Fabrication Issues 100%
• High Performance 50%
• Activation Energy 50%
• Rate Dependence 50%
• Oxidation Rate 50%
• Mole Fraction 50%
• AlxGa1-xN 50%
• Arrhenius 50%
• Water Temperature 50%
• Sample Temperature 50%
• Wet Thermal Oxidation 50%
• Thermal Oxidation Method 50%
• Carrier Gas Flow 50%
• Bubbler 50%

Engineering

• Emitting Laser 100%
• Aluminium Gallium Arsenide 100%
• Cavity Surface 100%
• Activation Energy 50%
• Gas Flow 50%
• Rate Dependence 50%
• Mole Fraction 50%
• Arrhenius 50%
• Sample Temperature 50%
• Carrier Gas 50%
• Thermal Oxidation 50%
• Rate Data 50%
• Oxidation Rate 50%
• Temperature Water 50%

Material Science

• Oxide Compound 100%
• Aluminium Gallium Arsenide 100%
• Surface (Surface Science) 100%
• Activation Energy 50%
• Gas Flow 50%