Fabrication issues of oxide-confined VCSELs

Kent M. Geib, Kent D. Choquette, Hong Q. Hou, B. E. Hammons

Research output: Chapter in Book/Report/Conference proceedingConference contribution


To insert high performance oxide-confined vertical-cavity surface-emitting lasers (VCSELs) into the manufacturing arena, we have examined the critical parameters that must be controlled to establish a repeatable and uniform wet thermal oxidation process for AlGaAs. These parameters include the AlAs mole fraction, the sample temperature, the carrier gas flow and the bubbler water temperature. Knowledge of these critical parameters has enabled the compilation of oxidation rate data for AlGaAs which exhibits an Arrhenius rate dependence. The compositionally dependent activation energies for AlxGa1-xAs layers of x equals 1.00, 0.98 and 0.92 are found to be 1.24, 1.75, and 1.88 eV, respectively.

Original languageEnglish (US)
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
EditorsKent D. Choquette, Dennis G. Deppe
PublisherSociety of Photo-Optical Instrumentation Engineers
Number of pages6
ISBN (Print)0819424145
StatePublished - Dec 1 1997
Externally publishedYes
EventVertical-Cavity Surface-Emitting Lasers - San Jose, CA, USA
Duration: Feb 13 1997Feb 14 1997

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X


OtherVertical-Cavity Surface-Emitting Lasers
CitySan Jose, CA, USA

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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