@inproceedings{771892dae902457d9ba45768fd757574,
title = "Fabrication issues of oxide-confined VCSELs",
abstract = "To insert high performance oxide-confined vertical-cavity surface-emitting lasers (VCSELs) into the manufacturing arena, we have examined the critical parameters that must be controlled to establish a repeatable and uniform wet thermal oxidation process for AlGaAs. These parameters include the AlAs mole fraction, the sample temperature, the carrier gas flow and the bubbler water temperature. Knowledge of these critical parameters has enabled the compilation of oxidation rate data for AlGaAs which exhibits an Arrhenius rate dependence. The compositionally dependent activation energies for AlxGa1-xAs layers of x equals 1.00, 0.98 and 0.92 are found to be 1.24, 1.75, and 1.88 eV, respectively.",
author = "Geib, {Kent M.} and Choquette, {Kent D.} and Hou, {Hong Q.} and Hammons, {B. E.}",
year = "1997",
language = "English (US)",
isbn = "0819424145",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "Society of Photo-Optical Instrumentation Engineers",
pages = "69--74",
editor = "Choquette, {Kent D.} and Deppe, {Dennis G.}",
booktitle = "Proceedings of SPIE - The International Society for Optical Engineering",
note = "Vertical-Cavity Surface-Emitting Lasers ; Conference date: 13-02-1997 Through 14-02-1997",
}