Fabrication and performance of large (64×64) arrays of integrated VCSELs and detectors

Kent M. Geib, Kent D. Choquette, Darwin K. Serkland, Andrew A. Allerman, Terry W. Hargett

Research output: Contribution to journalConference articlepeer-review


Vertical-cavity surface-emitting lasers (VCSELs) are uniquely suited for applications requiring high-density 2-dimensional arrays of lasers, such as massively parallel interconnects or imaging applications. We have successfully fabricated 64×64 arrays containing alternating rows of selectively-oxidized 850 nm VCSELs and resonant-cavity photodetectors (RCPDs) on semi-insulating GaAs. In order to reduce the input/output pin count, we employed a matrix addressable architecture, where all the VCSELs (or RCPDs) in each row are connected by a common metal trace at the base of their mesas. The columns are connected by metal traces that bridge from mesa top to mesa top, connecting every other row (i.e., only VCSELs or only RCPDs). The pitch of devices in the array is 55 microns, and total resistance contributed by the long (up to 3.5 mm) row and column traces is below 50 ohms. The epitaxial design, fabrication and performance of these arrays is discussed.

Original languageEnglish (US)
Pages (from-to)152-157
Number of pages6
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2002
Externally publishedYes
EventVertical-Cavity Surface-Emitting Lasers VI - San Jose, CA, United States
Duration: Jan 23 2002Jan 24 2002


  • Integrated VCSELs and detectors
  • VCSEL arrays

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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