Fabrication and performance evaluation of pixelated nano-wire grid polarizer

Shengkui Gao, Raphael Njuguna, Viktor Gruev

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Metal-based nano-wire grid polarizer (NWGP) is widely used in division of focal plane (DoFP) imaging sensors to capture polarization information of the imaged environment. In this paper, we present a procedure for fabricating aluminum pixelated NWGP structures using electron beam lithography (EBL) and reactive ion etching (RIE). We evaluate optical performance of the NWGP structures in terms of different orientations (0°, 45°, 90°, 135°), line widths (50nm to 500nm), and spectral response (460nm to 625nm).

Original languageEnglish (US)
Title of host publicationPolarization Science and Remote Sensing VI
DOIs
StatePublished - Dec 9 2013
Externally publishedYes
EventPolarization Science and Remote Sensing VI - San Diego, CA, United States
Duration: Aug 26 2013Aug 29 2013

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume8873
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Other

OtherPolarization Science and Remote Sensing VI
Country/TerritoryUnited States
CitySan Diego, CA
Period8/26/138/29/13

Keywords

  • DoFP
  • Linear polarizer
  • Lithography
  • Nano-wire
  • Polarization

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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