Fabrication and characterization of liquid and gaseous micro-and nanojets

Nisarga Maik, John Berg, Tanya Wright, Christophe Courcimault, Jungchul Lee, Mark Allen, Hanif Hunter, Kianoush Naeli, Oliver Brand, Ari Glezer, Bill King

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports on the fabrication and characterization of liquid and gaseous jets ejected from microfabricated nozzles with dimensions ranging from 500 nm to 12 μm. Unlike previous work reporting the fabrication of nano-orifices defined within the thickness of the substrates [1-4], the in-plane nanonozzles presented in this paper are designed to sustain the high pressures necessary to obtain substantial nanofluidic jet flows. This approach also allows important three-dimensional features of nozzle, channel and fluidic reservoir to be defined by design and not by fabrication constraints, thereby meeting important fluid-mechanical criteria such as a fully-developed flow. The shrinking jet dimensions demand new metrology tools to investigate their flow behavior. A laser shadowgraphy technique is used to visualize and image the jet flows. Micromachined heated and piezoresistive cantilevers are used to investigate the thrust and heat flux characteristics of the jets.

Original languageEnglish (US)
Title of host publicationAmerican Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
Pages731-736
Number of pages6
DOIs
StatePublished - 2005
Externally publishedYes
Event2005 ASME International Mecahnical Engineering Congress and Exposition, IMECE 2005 - Orlando, FL, United States
Duration: Nov 5 2005Nov 11 2005

Publication series

NameAmerican Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
Volume7 MEMS
ISSN (Print)1096-665X

Other

Other2005 ASME International Mecahnical Engineering Congress and Exposition, IMECE 2005
CountryUnited States
CityOrlando, FL
Period11/5/0511/11/05

Keywords

  • Cantilever
  • KOH wet etching
  • Laser shadowgraphy
  • Micro/Nanojet
  • Micro/Nanonozzle

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering
  • Control and Systems Engineering

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