Fabrication and characterization of individually addressable vertical-cavity surface-emitting laser arrays and integrated VCSEL / PIN detector arrays

A. M. Kasten, A. V. Giannopoulos, C. Long, C. Chen, Kent D Choquette

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

With the emergence of the internet, the demand for high data transmission rates in short haul area networks and fiber-to-the-desktop applications is increasing every year. Densely packed one-dimensional and two-dimensional vertical-cavity surface-emitting laser (VCSEL) arrays offer new possibilities for future short haul parallel optical links, free-space optical interconnects at the chip-to-chip, board-to-board, and on-board level. In this paper, we describe the manufacturing process of individually addressable two-dimensional VCSEL arrays, PIN detector arrays, and integrated VCSEL / PIN detector arrays. We also present measurement results of the fabricated devices and comment on the reliability.

Original languageEnglish (US)
Title of host publicationVertical-Cavity Surface-Emitting Lasers XI
DOIs
StatePublished - 2007
EventVertical-Cavity Surface-Emitting Lasers XI - San Jose, CA, United States
Duration: Jan 24 2007Jan 25 2007

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume6484
ISSN (Print)0277-786X

Other

OtherVertical-Cavity Surface-Emitting Lasers XI
Country/TerritoryUnited States
CitySan Jose, CA
Period1/24/071/25/07

Keywords

  • Data communication
  • Detector arrays
  • Integrated VCSEL / PIN detector arrays
  • VCSEL
  • VCSEL arrays

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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