Molecular dynamics simulations of low-energy noble-gas atoms impacting Si and Ge surfaces reveal a new, unexpectedly strong trade-off between the energy threshold for point defect formation and substrate temperature. Nonuniformities in the net surface potential induced by thermal vibrations dramatically affect the locality of momentum transfer to the surface, thereby amplifying the effect of temperature by several orders of magnitude. This amplification may offer a new means for selecting specific elementary rate processes during plasma processing or ion-beam-assisted deposition.
|Original language||English (US)|
|Number of pages||4|
|Journal||Physical Review B - Condensed Matter and Materials Physics|
|State||Published - Nov 15 2002|
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics