Exploring the limits and practicality of Q-based temperature compensation for silicon resonators

J. Salvia, M. Messana, M. Ohline, M. A. Hopcroft, R. Melamud, S. Chandorkar, H. K. Lee, Gaurav Bahl, B. Murmann, T. W. Kenny

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We investigate using quality factor as a thermometer in embedded temperature compensation systems for micromechanical silicon resonator-based frequency references. Our compensated 1.3 MHz prototype oscillator, implemented on a single printed circuit board, achieves temperature stability of ±1 ppm from 0 °C to 70 °C after multipoint calibration or ±25 ppm after single point calibration. Drawbacks and limitations of the compensation schemes are discussed.

Original languageEnglish (US)
Title of host publication2008 IEEE International Electron Devices Meeting, IEDM 2008
DOIs
StatePublished - 2008
Externally publishedYes
Event2008 IEEE International Electron Devices Meeting, IEDM 2008 - San Francisco, CA, United States
Duration: Dec 15 2008Dec 17 2008

Other

Other2008 IEEE International Electron Devices Meeting, IEDM 2008
CountryUnited States
CitySan Francisco, CA
Period12/15/0812/17/08

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Materials Chemistry
  • Electrical and Electronic Engineering

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