Experimental investigation on the heat transfer between a heated microcantilever and a substrate

Keyphrases

• Heat Transfer 100%
• Heated Microcantilever 100%
• Heated Cantilever 100%
• Silicon Substrate 50%
• Temperature Distribution 50%
• Air Gap 50%
• Thermometer 50%
• Thermal Interaction 50%
• Raster 50%
• Displacement Experiment 50%
• Nanoscale Technology 50%
• Temperature Coefficient of Resistance 50%
• SiO2 Coating 50%
• Heat Transfer Process 50%
• Contact Thermal Conductance 50%
• Platinum Resistance Thermometer 50%
• Forced Displacement 50%

Engineering

• Experimental Investigation 100%
• Microcantilevers 100%
• Nanoscale 50%
• Silicon Substrate 50%
• Force Displacement 50%
• Temperature Coefficient of the Resistance 50%
• Platinum Resistance Thermometer 50%
• Temperature Distribution 50%
• Silicon Dioxide 50%

Material Science

• Platinum 100%
• Transfer Process 50%
• Silicon Substrate 50%