Examination of a new DSMC method for modeling of multiscale flows in MEMS devices

The application of MEMS micro-propulsion devices promises technological advances for space vehicles. However, experimental data is still rare at these microscales. Hence, the validation of numerical methods against rarely available experimental data is crucial for accurate simulations of the flow properties in MEMS devices, since such simulations are necessary for assessing performance and improving system designs. A wide range of flow regimes occur in micronozzles, from the transitional to the continuum regime. This prevents the use of a single computational method, such as Direct Simulation Monte Carlo (DSMC) or CFD/Navier-Stokes. The proposed statistical technique extends the applicability of DSMC to the continuum regime and can be used to solve the wide range of MEMS flows when it is coupled with the baseline DSMC. A comparison of the results obtained by the eDSMC technique¹ with new experimental data obtained by NASA Glenn, and with the NS results for the set of high pressure micronozzles presented in this paper, provides further justification for the eDSMC method.