Evolution of thin-film morphologies in metals during ion beam bombardment

S. G. Mayr, Y. Ashkenazy, R. S. Averback

Research output: Contribution to journalConference articlepeer-review


The evolution of thin-film morphologies during ion beam bombardment has been examined by a combination of experimental and molecular dynamics simulation methods. Surface roughness, stress and domain growth in amorphous and nanocrystalline films were investigated. The experiments provide support for the model of radiation-induced viscous flow. The coefficient of radiation-induced viscosity deduced from the experiments is insensitive to both the particular material and the irradiation particle. The computer simulations, using molecular dynamics, reveal that while flow may be caused by local melting of nanometer-sized regions along the track of the ion, in some cases the simple creation of point defects is sufficient to explain radiation-induced stress relaxation.

Original languageEnglish (US)
Pages (from-to)246-252
Number of pages7
JournalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Issue number1-4
StatePublished - Dec 2003
EventAtomic Collisions in Solids - India, India
Duration: Jan 19 2003Jan 24 2003

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation


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