Evidence for a time dependent excitation process in silane radio frequency glow discharges

Gilles De Rosny, Earl R. Mosburg, John R. Abelson, Genevieve Devaud, Ralph C. Kerns

Research output: Contribution to journalArticlepeer-review

Fingerprint Dive into the research topics of 'Evidence for a time dependent excitation process in silane radio frequency glow discharges'. Together they form a unique fingerprint.

Physics & Astronomy