Etched cavity InGaAsP/InP waveguide Fabry-Perot filter tunable by current injection

H. K. Tsang; Mark W.K. Mak; L. Y. Chan; J. B.D. Soole; C. Youtsey; I. Adesida

doi:10.1109/50.793772

Etched cavity InGaAsP/InP waveguide Fabry-Perot filter tunable by current injection

H. K. Tsang, Mark W.K. Mak, L. Y. Chan, J. B.D. Soole, C. Youtsey, I. Adesida

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Abstract

A short cavity Fabry-Perot (FP) tunable filter was fabricated by chemically assisted ion beam etching (CAIBE) of an InGaAsP/InP waveguide. The FP cavity mirrors were formed by high reflectivity dielectric coatings deposited onto the two etched facets of the cavity. High-speed (less than 3 ns) wavelength-tuning of the filter was achieved by current injection. A super-linear dependence on current injection was observed in the wavelength tuning. The filter was tunable over a continuous range of 4 nm by up to 50 mA current injection. The device had a free-spectral range of 9 nm and gave a contrast ratio of about 10 dB. A theoretical simulation of the filter was developed using a beam propagation method calculation to estimate the reflection efficiency at different mirror tilt angles. The calculated contrast ratio of the filter was in good agreement with the measured result. The calculations showed that 20 dB contrast ratio should be possible by having a facet reflectivity of over 90% and ensuring that the etched facets are off-vertical by less than 1.8°.

Original language	English (US)
Pages (from-to)	1890-1895
Number of pages	6
Journal	Journal of Lightwave Technology
Volume	17
Issue number	10
DOIs	https://doi.org/10.1109/50.793772
State	Published - Oct 1999

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics

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10.1109/50.793772

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title = "Etched cavity InGaAsP/InP waveguide Fabry-Perot filter tunable by current injection",

abstract = "A short cavity Fabry-Perot (FP) tunable filter was fabricated by chemically assisted ion beam etching (CAIBE) of an InGaAsP/InP waveguide. The FP cavity mirrors were formed by high reflectivity dielectric coatings deposited onto the two etched facets of the cavity. High-speed (less than 3 ns) wavelength-tuning of the filter was achieved by current injection. A super-linear dependence on current injection was observed in the wavelength tuning. The filter was tunable over a continuous range of 4 nm by up to 50 mA current injection. The device had a free-spectral range of 9 nm and gave a contrast ratio of about 10 dB. A theoretical simulation of the filter was developed using a beam propagation method calculation to estimate the reflection efficiency at different mirror tilt angles. The calculated contrast ratio of the filter was in good agreement with the measured result. The calculations showed that 20 dB contrast ratio should be possible by having a facet reflectivity of over 90% and ensuring that the etched facets are off-vertical by less than 1.8°.",

author = "Tsang, {H. K.} and Mak, {Mark W.K.} and Chan, {L. Y.} and Soole, {J. B.D.} and C. Youtsey and I. Adesida",

note = "Funding Information: Manuscript received October 13, 1998; revised June 23, 1999. The work of H. K. Tsang, M. W. K. Mak, and L. Y. Chan was supported by a Hong Kong Research Grant Council Earmarked Grant CU-288-94E. H. K. Tsang, M. W. K. Mak, and L. Y. Chan are with the Department of Electronic Engineering, The Chinese University of Hong Kong, Shatin, Hong Kong, R.O.C. J. B. D. Soole was with Bellcore, Red Bank, NJ 07701 USA. He is now with Lucent Technologies, Bell Laboratories, Murray Hill, NJ 07974 USA. C. Youtsey and I. Adesida are with the Microelectronics Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801 USA. Publisher Item Identifier S 0733-8724(99)08015-9.",

year = "1999",

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language = "English (US)",

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AU - Tsang, H. K.

AU - Mak, Mark W.K.

AU - Chan, L. Y.

AU - Soole, J. B.D.

AU - Youtsey, C.

AU - Adesida, I.

N1 - Funding Information: Manuscript received October 13, 1998; revised June 23, 1999. The work of H. K. Tsang, M. W. K. Mak, and L. Y. Chan was supported by a Hong Kong Research Grant Council Earmarked Grant CU-288-94E. H. K. Tsang, M. W. K. Mak, and L. Y. Chan are with the Department of Electronic Engineering, The Chinese University of Hong Kong, Shatin, Hong Kong, R.O.C. J. B. D. Soole was with Bellcore, Red Bank, NJ 07701 USA. He is now with Lucent Technologies, Bell Laboratories, Murray Hill, NJ 07974 USA. C. Youtsey and I. Adesida are with the Microelectronics Laboratory, University of Illinois at Urbana-Champaign, Urbana, IL 61801 USA. Publisher Item Identifier S 0733-8724(99)08015-9.

PY - 1999/10

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N2 - A short cavity Fabry-Perot (FP) tunable filter was fabricated by chemically assisted ion beam etching (CAIBE) of an InGaAsP/InP waveguide. The FP cavity mirrors were formed by high reflectivity dielectric coatings deposited onto the two etched facets of the cavity. High-speed (less than 3 ns) wavelength-tuning of the filter was achieved by current injection. A super-linear dependence on current injection was observed in the wavelength tuning. The filter was tunable over a continuous range of 4 nm by up to 50 mA current injection. The device had a free-spectral range of 9 nm and gave a contrast ratio of about 10 dB. A theoretical simulation of the filter was developed using a beam propagation method calculation to estimate the reflection efficiency at different mirror tilt angles. The calculated contrast ratio of the filter was in good agreement with the measured result. The calculations showed that 20 dB contrast ratio should be possible by having a facet reflectivity of over 90% and ensuring that the etched facets are off-vertical by less than 1.8°.

AB - A short cavity Fabry-Perot (FP) tunable filter was fabricated by chemically assisted ion beam etching (CAIBE) of an InGaAsP/InP waveguide. The FP cavity mirrors were formed by high reflectivity dielectric coatings deposited onto the two etched facets of the cavity. High-speed (less than 3 ns) wavelength-tuning of the filter was achieved by current injection. A super-linear dependence on current injection was observed in the wavelength tuning. The filter was tunable over a continuous range of 4 nm by up to 50 mA current injection. The device had a free-spectral range of 9 nm and gave a contrast ratio of about 10 dB. A theoretical simulation of the filter was developed using a beam propagation method calculation to estimate the reflection efficiency at different mirror tilt angles. The calculated contrast ratio of the filter was in good agreement with the measured result. The calculations showed that 20 dB contrast ratio should be possible by having a facet reflectivity of over 90% and ensuring that the etched facets are off-vertical by less than 1.8°.

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Etched cavity InGaAsP/InP waveguide Fabry-Perot filter tunable by current injection

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