Erratum: Monte Carlo simulation of registration signals for electron beam microfabrication[App. Phys. Lett. 36, 6, 672 (1981)]

Yi Ching Lin, Ilesanmi Adesida, Andrew R. Neureuther

Research output: Contribution to journalComment/debate

Original languageEnglish (US)
Number of pages1
JournalApplied Physics Letters
Volume38
Issue number6
DOIs
StatePublished - Dec 1 1981

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electron beams
simulation

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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Erratum : Monte Carlo simulation of registration signals for electron beam microfabrication[App. Phys. Lett. 36, 6, 672 (1981)]. / Lin, Yi Ching; Adesida, Ilesanmi; Neureuther, Andrew R.

In: Applied Physics Letters, Vol. 38, No. 6, 01.12.1981.

Research output: Contribution to journalComment/debate

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